scholarly journals Designing, realization and characterization of a novel capacitive pressure/flow sensor

Author(s):  
R.E. Oosterbroek ◽  
T.S.J. Lammerink ◽  
J.W. Berenschot ◽  
A. van den Berg ◽  
M.C. Elwenspoek
Keyword(s):  
2002 ◽  
Vol 2 (5) ◽  
pp. 463-475 ◽  
Author(s):  
G. Kaltsas ◽  
A.A. Nassiopoulos ◽  
A.G. Nassiopoulou

2010 ◽  
Vol 55 (23) ◽  
pp. 2579-2583 ◽  
Author(s):  
Hui Cao ◽  
Qiang Lü ◽  
XiaoHui Song ◽  
ZhiYin Gan ◽  
Sheng Liu

2020 ◽  
Vol 53 (24) ◽  
pp. 245204 ◽  
Author(s):  
Girish Sharma ◽  
Nabiel Abuyazid ◽  
Sukrant Dhawan ◽  
Sayali Kshirsagar ◽  
R Mohan Sankaran ◽  
...  

Sensors ◽  
2011 ◽  
Vol 11 (12) ◽  
pp. 11856-11870 ◽  
Author(s):  
Davinia Font ◽  
Marcel Tresanchez ◽  
Tomàs Pallejà ◽  
Mercè Teixidó ◽  
Jordi Palacín

2013 ◽  
Vol 336-338 ◽  
pp. 134-138 ◽  
Author(s):  
Chun Tong Liu ◽  
Zhen Xin He ◽  
Yang Zhang ◽  
Hong Cai Li

On the basis of FBG (Fiber Bragg Grating) sensor principle analysis, a differential pressure flow sensor using FBG has been designed. The static pressure characteristics of the sensor were experimental studied by the hydraulic pressure calibrator and Q8384 spectrometer, and the experimental result errors were analyzed. Experimental results show that, the sensitivity coefficient of FBG is 3 pm/KPa in the differential pressure range of 0~0.35 MPa. The changes of Bragg wavelength with the pressure changes showing a good linear relationship and repetitive, and the hysteresis phenomenon is minor, which can be used for flow measurement of hydraulic system in special areas.


2015 ◽  
Vol 86 (4) ◽  
pp. 045004 ◽  
Author(s):  
P. Chen ◽  
Y. L. Zhao ◽  
B. Tian ◽  
C. Li ◽  
Y. Y. Li

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