Submicrometer Electron-Beam Direct Writing Technology for 1-Mbit DRAM Fabrication

1985 ◽  
Vol 20 (1) ◽  
pp. 88-93 ◽  
Author(s):  
T. Matsuda ◽  
K. Miyoshi ◽  
R. Yamaguchi ◽  
S. Moriya ◽  
T. Hosoya ◽  
...  
Keyword(s):  
Electron Beam ◽  
Direct Writing ◽  
Writing Technology

Development of single-layer positive resist process for electron beam direct writing technology

1995 ◽  
Vol 78 (8) ◽  
pp. 81-91 ◽  
Author(s):  
Hidenori Yamaguchi ◽  
Toshio Sakamizu ◽  
Fumio Murai ◽  
Hiroshi Shiraishi ◽  
Hajime Hayakawa ◽  
...  
Keyword(s):  
Electron Beam ◽  
Single Layer ◽  
Direct Writing ◽  
Writing Technology ◽  
Positive Resist

Electron Beam Direct Writing technology for LSI prototyping business

2010 ◽  
Vol 87 (5-8) ◽  
pp. 1131-1134 ◽  
Author(s):  
Yasuhide Machida ◽  
Takashi Maruyama ◽  
Yoshinori Kojima ◽  
Shinji Sugatani ◽  
Haruo Tsuchikawa ◽  
...  
Keyword(s):  
Electron Beam ◽  
Direct Writing ◽  
Writing Technology

Characterization of Fogging and Develop-Loading Effects in Electron-Beam Direct-Writing Technology

2012 ◽  
Vol 51 ◽  
pp. 06FC04 ◽  
Author(s):  
Jun-ichi Kon ◽  
Yoshinori Kojima ◽  
Yasushi Takahashi ◽  
Takashi Maruyama ◽  
Shinji Sugatani
Keyword(s):  
Electron Beam ◽  
Direct Writing ◽  
Loading Effects ◽  
Writing Technology

Electron beam direct writing technology applied to 512 kbit ROM with 1 µm geometry

1981 ◽  
Vol 28 (9) ◽  
pp. 1088-1094
Author(s):  
K. Suzuki ◽  
M. Morimoto ◽  
Nobuhiro Endo ◽  
M. Sugimoto ◽  
Y. Iida ◽  
...  
Keyword(s):  
Electron Beam ◽  
Direct Writing ◽  
Writing Technology

Electron beam direct writing technology for printed wiring board

2003 ◽  
Author(s):  
A. Kawazu ◽  
A. Yoshida ◽  
S. Hoshinouchi ◽  
H. Murakami ◽  
H. Tobuse
Keyword(s):  
Electron Beam ◽  
Direct Writing ◽  
Printed Wiring Board ◽  
Wiring Board ◽  
Writing Technology

Electron Beam Direct Writing Technology for 64-Mb DRAM LSIs

1990 ◽  
Vol 29 (Part 1, No. 11) ◽  
pp. 2590-2595 ◽  
Author(s):  
Fumio Murai ◽  
Yoshinori Nakayama ◽  
Isao Sakama ◽  
Toru Kaga ◽  
Yoshinobu Nakagome ◽  
...  
Keyword(s):  
Electron Beam ◽  
Direct Writing ◽  
Writing Technology

Electron-beam direct writing technology for LSI wiring process

1983 ◽  
Author(s):  
F. Murai ◽  
S. Okazaki ◽  
Y. Takeda ◽  
H. Obayashi
Keyword(s):  
Electron Beam ◽  
Direct Writing ◽  
Writing Technology

Electron-beam direct writing technology for fine gate patterning

1998 ◽  
Author(s):  
Kazuhiko Sato ◽  
Seiichiro Shirai ◽  
Hajime Hayakawa ◽  
Shinji Okazaki
Keyword(s):  
Electron Beam ◽  
Direct Writing ◽  
Writing Technology

Variable-shaped electron-beam direct writing technology for 1-µm VLSI fabrication

1981 ◽  
Vol 28 (11) ◽  
pp. 1279-1284 ◽  
Author(s):  
Y. Sakakibara ◽  
T. Ogawa ◽  
K. Komatsu ◽  
S. Moriya ◽  
M. Kobayashi ◽  
...  
Keyword(s):  
Electron Beam ◽  
Direct Writing ◽  
Writing Technology
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