Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromeckanical resonators for UHF applications

2005 ◽  
Author(s):  
G. Piazza ◽  
P.J. Stephanou ◽  
J.M. Porter ◽  
M.B.J. Wijesundara ◽  
A.P. Pisano
Keyword(s):  
Aluminum Nitride ◽  
Motional Resistance ◽  
Contour Mode

Dynamic Q-enhancement in aluminum nitride contour-mode resonators

2019 ◽  
Vol 115 (17) ◽  
pp. 173504 ◽  
Author(s):  
Changting Xu ◽  
Abhay Kochhar ◽  
Gianluca Piazza
Keyword(s):  
Aluminum Nitride ◽  
Contour Mode

Piezoelectric aluminum nitride MEMS annular dual contour mode filter

2007 ◽  
Vol 134 (1) ◽  
pp. 152-160 ◽  
Author(s):  
Philip J. Stephanou ◽  
Gianluca Piazza ◽  
Carolyn D. White ◽  
Muthu B.J. Wijesundara ◽  
Albert P. Pisano
Keyword(s):  
Aluminum Nitride ◽  
Contour Mode

scholarly journals Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS

2007 ◽  
Vol 136 (2) ◽  
pp. 638-645 ◽  
Author(s):  
Gianluca Piazza ◽  
Albert P. Pisano
Keyword(s):  
Aluminum Nitride ◽  
Contour Mode

scholarly journals Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

2006 ◽  
Vol 15 (6) ◽  
pp. 1406-1418 ◽  
Author(s):  
Gianluca Piazza ◽  
Philip J. Stephanou ◽  
Albert P. Pisano
Keyword(s):  
Aluminum Nitride ◽  
Mems Resonators ◽  
Contour Mode

scholarly journals Piezoelectric actuation of aluminum nitride contour mode optomechanical resonators

2015 ◽  
Vol 23 (12) ◽  
pp. 15477 ◽  
Author(s):  
Siddhartha Ghosh ◽  
Gianluca Piazza
Keyword(s):  
Aluminum Nitride ◽  
Piezoelectric Actuation ◽  
Contour Mode
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