Wavelength-selective integrated optical MEMS filter in InP

2005 ◽  
Author(s):  
M. Datta ◽  
M.W. Pruessner ◽  
K. Amarnath ◽  
J. McGee ◽  
S. Kanakaroju ◽  
...  
Keyword(s):  
Optical Mems ◽  
Integrated Optical ◽  
Mems Filter

Optical MEMS filter for gas spectroscopy

2009 ◽  
Author(s):  
Thor Bakke ◽  
Hakon Sagberg ◽  
Jon Olav Grepstad ◽  
Matthieu Lacolle ◽  
Aina K. Herbjornrod ◽  
...  
Keyword(s):  
Optical Mems ◽  
Mems Filter

Integrated optical MEMS serially coupled double racetrack resonator based accelerometer

Optik ◽  
2021 ◽  
Vol 236 ◽  
pp. 166583
Author(s):  
Venkateswara Rao Kolli ◽  
Prabhakar Dudla ◽  
Srinivas Talabattula
Keyword(s):  
Optical Mems ◽  
Integrated Optical ◽  
Racetrack Resonator

scholarly journals Integrated optical MEMS using through-wafer vias and bump-bonding.

2008 ◽  
Author(s):  
Frederick Bossert McCormick ◽  
Scott K. Frederick
Keyword(s):  
Optical Mems ◽  
Integrated Optical

Ion Beam Sputter Deposition Of Ferroelectric Oxide Thin Films

1991 ◽  
Vol 223 ◽  
Author(s):  
Thomas M. Graettinger ◽  
O. Auciello ◽  
M. S. Ameen ◽  
H. N. Al-Shareef ◽  
K. Gifford ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Growth Parameters ◽  
Ion Beam ◽  
Lead Zirconate ◽  
Electro Optic ◽  
Integrated Optical ◽  
Pzt Films ◽  
Ion Beam Sputter Deposition ◽  
Ferroelectric Oxide

ABSTRACTFerroelectric oxide films have been studied for their potential application as integrated optical materials and nonvolatile memories. Electro-optic properties of potassium niobate (KNbO3) thin films have been measured and the results correlated to the microstructures observed. The growth parameters necessary to obtain single phase perovskite lead zirconate titanate (PZT) thin films are discussed. Hysteresis and fatigue measurements of the PZT films were performed to determine their characteristics for potential memory devices.

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