Electrically driven ion transport in nanopores fabricated by metal assisted chemical etching method

2018 ◽  
Author(s):  
Nguyen Van Toan ◽  
Naoki Inomata ◽  
Masaya Toda ◽  
Takahito Ono
Keyword(s):  
Ion Transport ◽  
Chemical Etching ◽  
Etching Method ◽  
Metal Assisted Chemical Etching

Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method

2018 ◽  
Vol 29 (19) ◽  
pp. 195301 ◽  
Author(s):  
Nguyen Van Toan ◽  
Naoki Inomata ◽  
Masaya Toda ◽  
Takahito Ono
Keyword(s):  
Ion Transport ◽  
Chemical Etching ◽  
Etching Method ◽  
Metal Assisted Chemical Etching

scholarly journals Fabrication of nanocone arrays by two step metal assisted chemical etching method

2016 ◽  
Vol 153 ◽  
pp. 55-59 ◽  
Author(s):  
Tomohiro Shimizu ◽  
Norihiro Tanaka ◽  
Yoshihiro Tada ◽  
Yasuhiro Hara ◽  
Noriaki Nakamura ◽  
...  
Keyword(s):  
Chemical Etching ◽  
Etching Method ◽  
Metal Assisted Chemical Etching

Metal-Assisted Chemical Etching of Multicrystalline Silicon in HF/ Na2S2O8 Produces Porous Silicon

2005 ◽  
Vol 480-481 ◽  
pp. 139-144 ◽  
Author(s):  
T. Hadjersi ◽  
N. Gabouze ◽  
A. Ababou ◽  
M. Boumaour ◽  
W. Chergui ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Chemical Etching ◽  
Multicrystalline Silicon ◽  
Etching Time ◽  
X Ray Diffraction ◽  
Experimental Conditions ◽  
X Ray ◽  
External Bias ◽  
Etching Method ◽  
Metal Assisted Chemical Etching

A new metal-assisted chemical etching method using Na2S2O8 as an oxidant is proposed to form a porous layer on a multicrystalline silicon (mc-Si). This method does not need an external bias and enables formation of uniform porous silicon layers, more rapidly than the conventional stain etching method. A thin layer of Pd is deposited on the mc-Si surface prior to immersion in a solution of HF and Na2S2O8. The characterisations of etched layer formed by this method as a function of etching time were investigated by scanning electron microscopy, X-ray diffraction (XRD), Energy-dispersive X-ray (EDX) and reflectance spectroscopy. It shows that the surface is porous and the etching is independent of grain orientation. In addition, reflectance measurements made with a variety of etching conditions show a lowering of the reflectance from 25 % to 6 % measured with respect to the bare as-cut substrate. However, this result can be improved by changing the experimental conditions (concentration, time, temperature, …).

Fabricating and Controlling Silicon Zigzag Nanowires by Diffusion-Controlled Metal-Assisted Chemical Etching Method

Nano Letters ◽  
2017 ◽  
Vol 17 (7) ◽  
pp. 4304-4310 ◽  
Author(s):  
Yun Chen ◽  
Cheng Zhang ◽  
Liyi Li ◽  
Chia-Chi Tuan ◽  
Fan Wu ◽  
...  
Keyword(s):  
Chemical Etching ◽  
Etching Method ◽  
Diffusion Controlled ◽  
Metal Assisted Chemical Etching

Low Cost and High‐Aspect Ratio Micro/Nano Device Fabrication by Using Innovative Metal‐Assisted Chemical Etching Method

2019 ◽  
Vol 21 (8) ◽  
pp. 1900490 ◽  
Author(s):  
Nguyen Van Toan ◽  
Xiaoyue Wang ◽  
Naoki Inomata ◽  
Masaya Toda ◽  
Ioana Voiculescu ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Chemical Etching ◽  
Low Cost ◽  
Device Fabrication ◽  
Etching Method ◽  
Metal Assisted Chemical Etching

Hedgehog-like polycrystalline Si as anode material for high performance Li-ion battery

RSC Advances ◽  
2014 ◽  
Vol 4 (100) ◽  
pp. 57083-57086
Author(s):  
Chunqian Zhang ◽  
Chuanbo Li ◽  
Feihu Du ◽  
Kaixue Wang ◽  
Chunlai Xue ◽  
...  
Keyword(s):  
Lithium Ion Batteries ◽  
Anode Material ◽  
Chemical Etching ◽  
High Performance ◽  
Lithium Ion ◽  
Raw Material ◽  
Li Ion Battery ◽  
Etching Method ◽  
Li Ion ◽  
Metal Assisted Chemical Etching

A hedgehog-like Si nanomaterial has been prepared by metal assisted chemical etching method with polycrystalline Si powder as raw material and used as anode for lithium-ion batteries.

Fabrication of silicon nanorod arrays via a facile metal-assisted chemical etching method

2016 ◽  
Vol 27 (6) ◽  
pp. 5833-5838 ◽  
Author(s):  
Y. F. Zhu ◽  
L. Zhou ◽  
C. J. Pan ◽  
X. Guo ◽  
F. Gu ◽  
...  
Keyword(s):  
Chemical Etching ◽  
Nanorod Arrays ◽  
Etching Method ◽  
Metal Assisted Chemical Etching
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