etching method
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Author(s):  
Tieying Ma ◽  
Yipeng Wang ◽  
Jinzhu Zhou

Abstract Two - step etching method is used to prepare Si-based suspended tunnel structure with trapezoidal section. In the first wet etching, surfactant Triton-X-100 is added to TMAH enchant to inhibit crystal plane characteristics. Bulk Si Rib with trapezoidal cross section is formed, with inclination of side and height being modulated by changing etching time, so as to obtain good stability. After SiO2 support layer is grown by thermal oxidation, pure 25%TMAH is used in the second wet etching to quickly lateral etch and undercut the bulk silicon under the support layer and form a suspended structure along <100> opening. Using additive-no additive two-step etching method, suspended structure with high stability and compressive strength, good insulation characteristics, high yield can be prepared. It lays a solid foundation for the development of high sensitivity photo, thermal, chemical and gas sensors.


Micromachines ◽  
2021 ◽  
Vol 12 (12) ◽  
pp. 1557
Author(s):  
Yipeng Wang ◽  
Weijian Zhou ◽  
Tieying Ma

A four-step etching method is used to prepare the double-layer cross Si microchannel structure. In the first etching step, a <100> V-groove structure is etched on (100) silicon, and the top channel is formed after thermal oxidation with the depth of the channel and the slope of its sidewall being modulated by the etching time. The second etching step is to form a sinking substrate, and then the third step is to etch the bottom channel at 90° (<100> direction) and 45° (<110> direction) with the top channel, respectively. Hence, the bottom channel on the sink substrate is half-buried into the top channel. Undercut characteristic of 25% TMAH is used to perform the fourth step, etching through the overlapping part of the two layers of channels to form a double-layer microchannel structure. Different from the traditional single-layer microchannels, the double-layer crossed microchannels are prepared by the four-step etching method intersect in space but are not connected, which has structural advantages. Finally, when the angle between the top and bottom is 90°, the root cutting time at the intersection is up to 6 h, making the width of the bottom channel 4–5 times that of the top channel. When the angle between the top and bottom is 45°, the root cutting time at the intersection is only 4 h, and due to the corrosion along (111), the corrosion speed of the sidewall is very slow and the consistency of the width of the upper and lower channels is better than 90° after the end. Compared with the same-plane cross channel structure, the semiburied microchannel structure avoids the V-shaped path at the intersection, and the fluid can pass through the bottom channel in a straight line and cross with the top channel without overlapping, which has a structural advantage. If applied to microfluidic technology, high-efficiency delivery of two substances can be carried out independently in the same area; if applied to microchannel heat dissipation technology, the heat conduction area of the fluid can be doubled under the same heat dissipation area, thereby increasing the heat dissipation efficiency.


Author(s):  
David Jui-Yang Feng ◽  
Heng Kuo ◽  
Cheng-Fu Yang

The epitaxial lift-off (ELO) process based on selectively etching a thin sacrificial AlAs layer from GaAs substrate was performed using high-concentrated aqueous hydrofluoric (HF) etchant. However, because of using the wet etching method, the traditional ELO process has many drawbacks and limitations. Supercritical fluids (SCFs) naturally have the characteristics of low viscosity, high diffusivity, and zero surface tension. Therefore, the development of a gas-phase-like dry etching method based on mixing HF into CO2 and operating the mixture of HF/CO2 in SCFs condition as etchant is hereby proposed to overcome those bottlenecks existing in traditional wet ELO processes. However, there are no available experimental results for etching AlAs layers by HF in SCFs yet. Therefore, a HF-compatible corrosion-resistant high-pressure system was designed and built up to perform the idea. The capabilities of etching sample in supercritical CO2 (scCO2) had been systemically investigated under various pressures (2000–3000 psi) and temperatures (40–60[Formula: see text]C). Besides, the etching performances separately conducted by using aqueous-HF and anhydrous HF/Pyridine as the source etchant and mixing with scCO2 at a fixed temperature, pressure and etching time were also examined and compared under different equivalent HF concentrations. An evaluation of using acetone as the co-solvent mixed with HF/scCO2 mixture for enhancing the etch rate in different volume ratio of HF/co-solvent was further investigated and discussed. With this system, we demonstrate releasing a size of [Formula: see text] (width × length) and 3 [Formula: see text]m-thick free-standing GaAs sheet from a 150 nm AlAs sacrificial layer by the etching sample in HF/scCO2 mixture. The released GaAs sheet was also successfully transferred to a flexible PET substrate by using a PDMS stamp and an adhesive layer of NOA61.


2021 ◽  
Vol 11 (1) ◽  
pp. 138-146
Author(s):  
Yuan Xie ◽  
Yuanhua He ◽  
Xiantao Chen ◽  
Daqin Bu ◽  
Xiaolong He ◽  
...  

Abstract Establishing the correlation between the topography and the bactericidal performance is the key to improve the mechano-bactericidal activity. However, due to the complexity of the mechano-bactericidal mechanism, the correlation between density and bactericidal performance is still not clear. Based on this, a series of nanoblades (NBs) with various density but similar thickness and height were prepared on the chemically strengthened glass (CSG) substrate by a simple alkaline etching method. The mechano-bactericidal properties of NBs on CSG (NBs@CSG) surfaces exposed to Escherichia coli were evaluated. The results show that with the NB density increasing, the mechano-bactericidal performance of the surface increased first and then decreased. Besides, the bactericidal performance of NBs@CSG is not affected after four consecutive ultrasonic cleaning bactericidal experiments. This article can provide guidance for the design of the new generation of mechano-bactericidal surfaces. In addition, this technology is expected to be applied to the civil aviation cabin window lining.


Author(s):  
Zhe Huang ◽  
Hau Ping Chan ◽  
Emma Pickwell-MacPherson ◽  
Edward P. J. Parrott

2021 ◽  
Author(s):  
Xinchun Gao ◽  
Muyao Song ◽  
Dewu Sun ◽  
Renquan Guan ◽  
Hongju Zhai ◽  
...  
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