A Novel Solid State Pulsed Power Module for Excimer aser

Conference Record of the 2006 Twenty-Seventh International Power Modulator Symposium ◽

10.1109/modsym.2006.365218 ◽

2006 ◽

Author(s):

Claus Strowitzki ◽

Michael Baumann ◽

Peter Zacharias

Keyword(s):

Solid State ◽

Pulsed Power ◽

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Performance characterization for an excimer laser solid-state pulsed power module (SSPPM) after 20B shots

IEEE Transactions on Plasma Science ◽

10.1109/27.901191 ◽

2000 ◽

Vol 28 (5) ◽

pp. 1324-1328 ◽

Author(s):

R. Ness ◽

P.C. Melcher ◽

B. Smith ◽

W.N. Partlo ◽

D. Birx

Keyword(s):

Solid State ◽

Excimer Laser ◽

Pulsed Power ◽

Power Module ◽

Performance Characterization

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A novel solid state pulsed power module for excimer laser

IEEE Transactions on Dielectrics and Electrical Insulation ◽

10.1109/tdei.2011.5976121 ◽

2011 ◽

Vol 18 (4) ◽

pp. 1236-1241 ◽

Author(s):

Claus Strowitzki ◽

Peter Seckl ◽

Peter Zacharias

Keyword(s):

Solid State ◽

Excimer Laser ◽

Pulsed Power ◽

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Timing compensation for an excimer laser solid-state pulsed power module (SSPPM)

IEEE Transactions on Plasma Science ◽

10.1109/27.901192 ◽

2000 ◽

Vol 28 (5) ◽

pp. 1329-1332 ◽

Author(s):

D. Johns ◽

R. Ness ◽

B. Smith

Keyword(s):

Solid State ◽

Excimer Laser ◽

Pulsed Power ◽

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Design and Experimental Study of an Excimer Laser Based on Solid State Pulsed Power Module

Chinese Journal of Lasers ◽

10.3788/cjl20103702.0370 ◽

2010 ◽

Vol 37 (2) ◽

pp. 370-373

Author(s):

游利兵 You Libing ◽

梁勖 Liang Xu ◽

余吟山 Yu Yinshan

Keyword(s):

Experimental Study ◽

Solid State ◽

Excimer Laser ◽

Pulsed Power ◽

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A novel solid state pulsed power module for excimer laser

2010 IEEE International Power Modulator and High Voltage Conference ◽

10.1109/ipmhvc.2010.5958370 ◽

2010 ◽

Author(s):

Claus F. Strowitzki ◽

Peter Zacharias ◽

Peter Seckl

Keyword(s):

Solid State ◽

Excimer Laser ◽

Pulsed Power ◽

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A Novel Solid State Pulsed Power Module for Excimer Laser

Acta Physica Polonica A ◽

10.12693/aphyspola.115.992 ◽

2009 ◽

Vol 115 (6) ◽

pp. 992-994

Author(s):

C. Strowitzki

Keyword(s):

Solid State ◽

Excimer Laser ◽

Pulsed Power ◽

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Solid-state pulsed power module (SSPPM) design for a dense plasma focus (DPF) device for semiconductor lithography applications

PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference. Digest of Papers (Cat. No.01CH37251) ◽

10.1109/ppps.2001.1001779 ◽

2002 ◽

Author(s):

R.M. Ness ◽

W.N. Partlo

Keyword(s):

Solid State ◽

Plasma Focus ◽

Dense Plasma ◽

Pulsed Power ◽

Dense Plasma Focus ◽

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Solid state pulsed power module (SSPPM) design for a dense plasma focus (DPF) device for semiconductor lithography applications

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961026 ◽

2002 ◽

Author(s):

R. Ness ◽

B. Partlo

Keyword(s):

Solid State ◽

Plasma Focus ◽

Dense Plasma ◽

Pulsed Power ◽

Dense Plasma Focus ◽

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A durable microsecond solid-state pulsed power system

Review of Scientific Instruments ◽

10.1063/5.0049795 ◽

2021 ◽

Vol 92 (5) ◽

pp. 054707

Author(s):

Rong Chen ◽

Baoliang Qian ◽

Jianhua Yang ◽

Xinbing Cheng ◽

Jiuyuan Geng

Keyword(s):

Solid State ◽

Power System ◽

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Evaluation of high frequency solid state switches for pulsed power applications using a 12 kW variable voltage testbed

2017 IEEE 21st International Conference on Pulsed Power (PPC) ◽

10.1109/ppc.2017.8291289 ◽

2017 ◽

Author(s):

T. Flack ◽

J. Parson ◽

K. Bittner ◽

B. Driver ◽

N. Zameroski ◽

...

Keyword(s):

Solid State ◽

High Frequency ◽

Pulsed Power ◽

Variable Voltage

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