scholarly journals Solid-state pulsed power module (SSPPM) design for a dense plasma focus (DPF) device for semiconductor lithography applications

Author(s):  
R.M. Ness ◽  
W.N. Partlo
2000 ◽  
Vol 71 (3) ◽  
pp. 1360-1362 ◽  
Author(s):  
R. Petr ◽  
D. Reilly ◽  
J. Freshman ◽  
N. Orozco ◽  
D. Pham ◽  
...  

2000 ◽  
Vol 39 (Part 1, No. 2A) ◽  
pp. 607-611 ◽  
Author(s):  
Rodney Petr ◽  
Dennis Reilly ◽  
Jay Freshman ◽  
Nelson Orozco ◽  
Dan Pham ◽  
...  

2016 ◽  
Vol 113 ◽  
pp. 109-118 ◽  
Author(s):  
M. Chernyshova ◽  
V.A. Gribkov ◽  
E. Kowalska-Strzeciwilk ◽  
M. Kubkowska ◽  
R. Miklaszewski ◽  
...  

Author(s):  
A. Schmidt ◽  
E. Anaya ◽  
M. Anderson ◽  
J. Angus ◽  
S. Chapman ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document