Laser-produced plasma source development for EUV lithography

2009 ◽  
Author(s):  
H. Komori ◽  
T. Abe ◽  
A. Sumitani ◽  
Y. Watanabe ◽  
T. Ishihara ◽  
...  
Keyword(s):  
Plasma Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Laser-produced plasma source development for EUV lithography

2009 ◽  
Author(s):  
Akira Endo ◽  
Hiroshi Komori ◽  
Yoshifumi Ueno ◽  
Krzysztof M. Nowak ◽  
Yabu Takayuki ◽  
...  
Keyword(s):  
Plasma Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

First generation laser-produced plasma source system for HVM EUV lithography

2010 ◽  
Author(s):  
Hakaru Mizoguchi ◽  
Tamotsu Abe ◽  
Yukio Watanabe ◽  
Takanobu Ishihara ◽  
Takeshi Ohta ◽  
...  
Keyword(s):  
First Generation ◽  
Plasma Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Status of the liquid-xenon-jet laser-plasma source for EUV lithography

2002 ◽  
Author(s):  
Bjoern A. M. Hansson ◽  
Lars Rymell ◽  
Magnus Berglund ◽  
Oscar E. Hemberg ◽  
Emmanuelle Janin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Xenon ◽  
Euv Lithography

Efficient multiline nanosecond pulse amplification in planar waveguide CO_2 amplifier for extreme UV laser-produced plasma source

2014 ◽  
Vol 39 (7) ◽  
pp. 1953 ◽  
Author(s):  
Krzysztof M. Nowak ◽  
Takeshi Ohta ◽  
Takashi Suganuma ◽  
Junichi Fujimoto ◽  
Hakaru Mizoguchi ◽  
...  
Keyword(s):  
Planar Waveguide ◽  
Plasma Source ◽  
Nanosecond Pulse ◽  
Uv Laser ◽  
Pulse Amplification ◽  
Laser Produced Plasma ◽  
Extreme Uv

Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography

2012 ◽  
Author(s):  
Junichi Fujimoto ◽  
Tsukasa Hori ◽  
Tatsuya Yanagida ◽  
Takeshi Ohta ◽  
Yasufumi Kawasuji ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography

2004 ◽  
Author(s):  
Takashi Suganuma ◽  
Tamotsu Abe ◽  
Hiroshi Komori ◽  
Yuichi Takabayashi ◽  
Akira Endo
Keyword(s):  
Light Source ◽  
Liquid Xenon ◽  
Euv Lithography ◽  
Laser Produced Plasma

A Soft X-Ray/EUV Reflectometer Based on a Laser Produced Plasma Source

1992 ◽  
Vol 3 (4) ◽  
pp. 283-299
Author(s):  
E. M. Gullikson ◽  
J. H. Underwood ◽  
P. C. Batson ◽  
V. Nikitin
Keyword(s):  
Plasma Source ◽  
X Ray ◽  
Laser Produced Plasma

Low-Energy Plasma Source for Clean Vacuum Environments: EUV Lithography and Optical Mirrors Cleaning

2021 ◽  
pp. 1-10
Author(s):  
Jacqueline van Veldhoven ◽  
Aneta S. Stodolna ◽  
Arnold Storm ◽  
Jeroen van Brink den ◽  
Niels Geerits ◽  
...  
Keyword(s):  
Plasma Source ◽  
Low Energy ◽  
Euv Lithography ◽  
Optical Mirrors

Laser-produced-plasma light source for EUV lithography

2005 ◽  
Author(s):  
Georg Soumagne ◽  
Tamotsu Abe ◽  
Takashi Suganuma ◽  
Yousuke Imai ◽  
Hiroshi Someya ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma
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