ScienceGate
Advanced Search
Author Search
Journal Finder
Blog
Sign in / Sign up
ScienceGate
Search
Author Search
Journal Finder
Blog
Sign in / Sign up
Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography
Mapping Intimacies
◽
10.1117/12.596356
◽
2004
◽
Author(s):
Takashi Suganuma
◽
Tamotsu Abe
◽
Hiroshi Komori
◽
Yuichi Takabayashi
◽
Akira Endo
Keyword(s):
Light Source
◽
Liquid Xenon
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
Related Documents
Cited By
References
Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography
10.1117/12.916093
◽
2012
◽
Cited By ~ 11
Author(s):
Junichi Fujimoto
◽
Tsukasa Hori
◽
Tatsuya Yanagida
◽
Takeshi Ohta
◽
Yasufumi Kawasuji
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
Laser-produced-plasma light source for EUV lithography
10.1117/12.599333
◽
2005
◽
Cited By ~ 11
Author(s):
Georg Soumagne
◽
Tamotsu Abe
◽
Takashi Suganuma
◽
Yousuke Imai
◽
Hiroshi Someya
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
Metrology of laser-produced plasma light source for EUV lithography
10.1117/12.600809
◽
2005
◽
Cited By ~ 2
Author(s):
N. R. Boewering
◽
J. R. Hoffman
◽
O. V. Khodykin
◽
C. L. Rettig
◽
B. A. M. Hansson
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
Progress of a laser-produced-plasma light source for EUV lithography
Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
◽
10.1109/imnc.2003.1268753
◽
2004
◽
Author(s):
H. Komori
◽
T. Abe
◽
T. Suganuma
◽
Y. Imai
◽
H. Someya
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
100W 1st generation laser-produced plasma light source system for HVM EUV lithography
10.1117/12.880382
◽
2011
◽
Cited By ~ 13
Author(s):
Hakaru Mizoguchi
◽
Tamotsu Abe
◽
Yukio Watanabe
◽
Takanobu Ishihara
◽
Takeshi Ohta
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
Performance of a 10-kHz laser-produced-plasma light source for EUV lithography
10.1117/12.536076
◽
2004
◽
Cited By ~ 3
Author(s):
Tamotsu Abe
◽
Takashi Suganuma
◽
Yousuke Imai
◽
Hiroshi Someya
◽
Hideo Hoshino
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
Development of liquid-jet laser-produced plasma light source for EUV lithography
10.1117/12.483598
◽
2003
◽
Cited By ~ 2
Author(s):
Tamotsu Abe
◽
Takashi Suganuma
◽
Yousuke Imai
◽
Yukihiko Sugimoto
◽
Hiroshi Someya
◽
...
Keyword(s):
Light Source
◽
Liquid Jet
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
Preface to Special Issue on EUV Lithography Light Source by Laser Produced Plasma is Near at Hand
The Review of Laser Engineering
◽
10.2184/lsj.36.672
◽
2008
◽
Vol 36
(11)
◽
pp. 672-672
Author(s):
Koichi TOYODA
Keyword(s):
Light Source
◽
Special Issue
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source
Applied Physics Express
◽
10.35848/1882-0786/abbea3
◽
2020
◽
Vol 13
(11)
◽
pp. 115501
Author(s):
Yoshiyuki Honda
◽
Tatsuya Yanagida
◽
Yutaka Shiraishi
◽
Masayuki Morita
◽
Masahiko Andou
◽
...
Keyword(s):
Surface Morphology
◽
Light Source
◽
Protective Film
◽
Morphology Change
◽
Laser Produced Plasma
Download Full-text
Status of the liquid-xenon-jet laser-plasma source for EUV lithography
10.1117/12.472274
◽
2002
◽
Cited By ~ 20
Author(s):
Bjoern A. M. Hansson
◽
Lars Rymell
◽
Magnus Berglund
◽
Oscar E. Hemberg
◽
Emmanuelle Janin
◽
...
Keyword(s):
Laser Plasma
◽
Plasma Source
◽
Liquid Xenon
◽
Euv Lithography
Download Full-text
Sign in / Sign up
Close
Export Citation Format
Close
Share Document
Close