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Laser-produced plasma source development for EUV lithography
Mapping Intimacies
◽
10.1117/12.813639
◽
2009
◽
Cited By ~ 8
Author(s):
Akira Endo
◽
Hiroshi Komori
◽
Yoshifumi Ueno
◽
Krzysztof M. Nowak
◽
Yabu Takayuki
◽
...
Keyword(s):
Plasma Source
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
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Cited By
References
Laser-produced plasma source development for EUV lithography
2009 IEEE International Conference on Plasma Science - Abstracts
◽
10.1109/plasma.2009.5227297
◽
2009
◽
Author(s):
H. Komori
◽
T. Abe
◽
A. Sumitani
◽
Y. Watanabe
◽
T. Ishihara
◽
...
Keyword(s):
Plasma Source
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
First generation laser-produced plasma source system for HVM EUV lithography
10.1117/12.846271
◽
2010
◽
Cited By ~ 16
Author(s):
Hakaru Mizoguchi
◽
Tamotsu Abe
◽
Yukio Watanabe
◽
Takanobu Ishihara
◽
Takeshi Ohta
◽
...
Keyword(s):
First Generation
◽
Plasma Source
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
Status of the liquid-xenon-jet laser-plasma source for EUV lithography
10.1117/12.472274
◽
2002
◽
Cited By ~ 20
Author(s):
Bjoern A. M. Hansson
◽
Lars Rymell
◽
Magnus Berglund
◽
Oscar E. Hemberg
◽
Emmanuelle Janin
◽
...
Keyword(s):
Laser Plasma
◽
Plasma Source
◽
Liquid Xenon
◽
Euv Lithography
Download Full-text
Efficient multiline nanosecond pulse amplification in planar waveguide CO_2 amplifier for extreme UV laser-produced plasma source
Optics Letters
◽
10.1364/ol.39.001953
◽
2014
◽
Vol 39
(7)
◽
pp. 1953
◽
Cited By ~ 1
Author(s):
Krzysztof M. Nowak
◽
Takeshi Ohta
◽
Takashi Suganuma
◽
Junichi Fujimoto
◽
Hakaru Mizoguchi
◽
...
Keyword(s):
Planar Waveguide
◽
Plasma Source
◽
Nanosecond Pulse
◽
Uv Laser
◽
Pulse Amplification
◽
Laser Produced Plasma
◽
Extreme Uv
Download Full-text
Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography
10.1117/12.916093
◽
2012
◽
Cited By ~ 11
Author(s):
Junichi Fujimoto
◽
Tsukasa Hori
◽
Tatsuya Yanagida
◽
Takeshi Ohta
◽
Yasufumi Kawasuji
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography
10.1117/12.596356
◽
2004
◽
Author(s):
Takashi Suganuma
◽
Tamotsu Abe
◽
Hiroshi Komori
◽
Yuichi Takabayashi
◽
Akira Endo
Keyword(s):
Light Source
◽
Liquid Xenon
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
Development of Laser Produced Plasma Source for Extreme Ultraviolet Lithography
The Review of Laser Engineering
◽
10.2184/lsj.36.684
◽
2008
◽
Vol 36
(11)
◽
pp. 684-689
Author(s):
Akira SUMITANI
Keyword(s):
Extreme Ultraviolet
◽
Plasma Source
◽
Extreme Ultraviolet Lithography
◽
Ultraviolet Lithography
◽
Laser Produced Plasma
Download Full-text
A Soft X-Ray/EUV Reflectometer Based on a Laser Produced Plasma Source
Journal of X-Ray Science and Technology
◽
10.3233/xst-1992-3402
◽
1992
◽
Vol 3
(4)
◽
pp. 283-299
Author(s):
E. M. Gullikson
◽
J. H. Underwood
◽
P. C. Batson
◽
V. Nikitin
Keyword(s):
Plasma Source
◽
X Ray
◽
Laser Produced Plasma
Download Full-text
Low-Energy Plasma Source for Clean Vacuum Environments: EUV Lithography and Optical Mirrors Cleaning
IEEE Transactions on Plasma Science
◽
10.1109/tps.2021.3110423
◽
2021
◽
pp. 1-10
Author(s):
Jacqueline van Veldhoven
◽
Aneta S. Stodolna
◽
Arnold Storm
◽
Jeroen van Brink den
◽
Niels Geerits
◽
...
Keyword(s):
Plasma Source
◽
Low Energy
◽
Euv Lithography
◽
Optical Mirrors
Download Full-text
Laser-produced-plasma light source for EUV lithography
10.1117/12.599333
◽
2005
◽
Cited By ~ 11
Author(s):
Georg Soumagne
◽
Tamotsu Abe
◽
Takashi Suganuma
◽
Yousuke Imai
◽
Hiroshi Someya
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
Download Full-text
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