Modification of light scattering properties of boron doped zinc oxide grown by Low Pressure Chemical Vapour Deposition using wet chemical etching

2010 ◽  
Author(s):  
S. Calnan ◽  
C. David ◽  
A. Neumann ◽  
N. Papathanasiou ◽  
R. Schlatmann ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Light Scattering ◽  
Chemical Vapour Deposition ◽  
Chemical Etching ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Boron Doped ◽  
Pressure Chemical ◽  
Wet Chemical ◽  
Wet Chemical Etching

SiC Freestanding Micromechanical Structures on Silicon-On-Insulator Substrates

2009 ◽  
Vol 615-617 ◽  
pp. 617-620 ◽  
Author(s):  
Marcel Placidi ◽  
Marcin Zielinski ◽  
Gabriel Abadal ◽  
Josep Montserrat ◽  
Phillippe Godignon
Keyword(s):  
Chemical Etching ◽  
Growth Process ◽  
Vapour Deposition ◽  
Sacrificial Layer ◽  
Chemical Vapour ◽  
Silicon On Insulator ◽  
Silicon Substrates ◽  
Wet Chemical ◽  
Micromechanical Structures ◽  
Wet Chemical Etching

The fabrication of freestanding SiC microstructures on Silicon-On-Insulator (SOI) and semi-insulating Silicon substrates is reported. SiC layers were grown on SOI and semi-insulating Si by chemical vapour deposition (CVD) and to avoid the instability currently obtained in SOI structures, the growth process parameters have been optimized. Isotropic wet chemical etching of the Si sacrificial layer released the electrostatic SiC microstructures patterned by dry etching. Moreover a new concept for reducing the gap between resonators and electrodes by the uses of bistable mobile electrodes is introduced.

Microstructure of boron-doped silicon layers prepared by low pressure chemical vapour deposition

1987 ◽  
Vol 150 (1) ◽  
pp. 69-82 ◽  
Author(s):  
D. Bielle-Daspet ◽  
F. Mansour-Bahloul ◽  
A. Martinez ◽  
B. Pieraggi ◽  
M.J. David ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Boron Doped ◽  
Doped Silicon ◽  
Pressure Chemical

Low-pressure chemical vapour deposition of mullite coatings in a cold-wall reactor

1999 ◽  
Vol 09 (PR8) ◽  
pp. Pr8-395-Pr8-402 ◽  
Author(s):  
B. Armas ◽  
M. de Icaza Herrera ◽  
C. Combescure ◽  
F. Sibieude ◽  
D. Thenegal
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Cold Wall ◽  
Pressure Chemical ◽  
Mullite Coatings
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