A Pneumatically Actuated Micro Valve With A Silicone Rubber Membrane For Integration With Fluid-handling Systems
1984 ◽
Vol 73
(8)
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pp. 1028-1034
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2019 ◽
Vol 189
(1)
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pp. 217-232
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Keyword(s):
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2002 ◽
Vol 7
(5)
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pp. 289-294
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