K-band capacitive MEMS-switches

2002 ◽  
Author(s):  
M. Ulm ◽  
T. Walter ◽  
R. Mueller-Fiedler ◽  
K. Voigtlaender ◽  
E. Kasper
Keyword(s):  
Mems Switches ◽  
Capacitive Mems ◽  
K Band

K-band capacitive MEMS switches on GaAs substrate: Design, fabrication, and reliability

2012 ◽  
Vol 52 (9-10) ◽  
pp. 2245-2249 ◽  
Author(s):  
A. Persano ◽  
A. Tazzoli ◽  
P. Farinelli ◽  
G. Meneghesso ◽  
P. Siciliano ◽  
...  
Keyword(s):  
Gaas Substrate ◽  
Mems Switches ◽  
Capacitive Mems ◽  
K Band

Tailoring design and fabrication of capacitive RF MEMS switches for K-band applications

2015 ◽  
Author(s):  
Fabio Quaranta ◽  
Anna Persano ◽  
Giovanni Capoccia ◽  
Antonietta Taurino ◽  
Adriano Cola ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
K Band

Study of Residual charing in dielectric less capacitive MEMS switches

2008 ◽  
Author(s):  
D. Mardivirin ◽  
D. Bouyge ◽  
A. Crunteanu ◽  
A. Pothier ◽  
P. Blondy
Keyword(s):  
Mems Switches ◽  
Capacitive Mems

Capacitive MEMS Switches

2012 ◽  
pp. 363-374
Author(s):  
Dimitrios Peroulis ◽  
Prashant R. Waghmare ◽  
Sushanta K. Mitra ◽  
Supone Manakasettharn ◽  
J. Ashley Taylor ◽  
...  
Keyword(s):  
Mems Switches ◽  
Capacitive Mems
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