Investigations on an Integrated Optical Position Detection of Micromachined Scanning Mirrors

Author(s):  
T. Schuster ◽  
T. Sandner ◽  
H. Lakner
Author(s):  
W. Krybus ◽  
A. Knepper ◽  
L. Adams ◽  
R. Rüger ◽  
D. Meyer-Ebrecht

1998 ◽  
Vol 317 (1-2) ◽  
pp. 421-424 ◽  
Author(s):  
E Fortunato ◽  
F Soares ◽  
G Lavareda ◽  
R Martins

Author(s):  
Andreas Tortschanoff ◽  
Marcus Baumgart ◽  
Dominik Holzmann ◽  
Christoph Mayer ◽  
Thilo Sandner ◽  
...  

1991 ◽  
Vol 223 ◽  
Author(s):  
Thomas M. Graettinger ◽  
O. Auciello ◽  
M. S. Ameen ◽  
H. N. Al-Shareef ◽  
K. Gifford ◽  
...  

ABSTRACTFerroelectric oxide films have been studied for their potential application as integrated optical materials and nonvolatile memories. Electro-optic properties of potassium niobate (KNbO3) thin films have been measured and the results correlated to the microstructures observed. The growth parameters necessary to obtain single phase perovskite lead zirconate titanate (PZT) thin films are discussed. Hysteresis and fatigue measurements of the PZT films were performed to determine their characteristics for potential memory devices.


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