Investigations on an Integrated Optical Position Detection of Micromachined Scanning Mirrors
2008 ◽
Vol 46
(6)
◽
pp. 471-481
◽
1994 ◽
Vol 40
(3)
◽
pp. 237-242
◽
1998 ◽
Vol 317
(1-2)
◽
pp. 421-424
◽
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