Extreme Precise Motion Tracking of Piezoelectric Positioning Stage Using Sampled-Data Iterative Learning Control
2013 ◽
Vol 21
(4)
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pp. 1432-1439
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2004 ◽
Vol 14
(8)
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pp. 719-739
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2015 ◽
Vol 12
(3)
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pp. 307-315
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2014 ◽
Vol 351
(2)
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pp. 1130-1150
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