Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting

2013 ◽  
Vol 43 (1) ◽  
pp. 196-207 ◽  
Author(s):  
NaiQi Wu ◽  
Feng Chu ◽  
Chengbin Chu ◽  
MengChu Zhou
Keyword(s):  
Petri Net ◽  
Cycle Time ◽  
Time Analysis ◽  
Cluster Tools ◽  
Dual Arm

scholarly journals A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

2013 ◽  
Vol 43 (5) ◽  
pp. 1182-1194 ◽  
Author(s):  
NaiQi Wu ◽  
MengChu Zhou ◽  
Feng Chu ◽  
Chengbin Chu
Keyword(s):  
Petri Net ◽  
Scheduling Strategy ◽  
Cluster Tools ◽  
Dual Arm
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