Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting

2012 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2012.6386329 ◽

2012 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Scheduling Analysis ◽

Cluster Tools ◽

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Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints

2013 10th IEEE INTERNATIONAL CONFERENCE ON NETWORKING, SENSING AND CONTROL (ICNSC) ◽

10.1109/icnsc.2013.6548746 ◽

2013 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou ◽

QingYun Dai

Keyword(s):

Petri Net ◽

Time Constraints ◽

Scheduling Analysis ◽

Cluster Tools ◽

Dual Arm ◽

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Schedulability and Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting and Residency Time Constraints Based on a Novel Schedule

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmc.2014.2347928 ◽

2015 ◽

Vol 45 (3) ◽

pp. 472-484 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Time Constraints ◽

Scheduling Analysis ◽

Cluster Tools ◽

Dual Arm ◽

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A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmca.2012.2230440 ◽

2013 ◽

Vol 43 (5) ◽

pp. 1182-1194 ◽

Author(s):

NaiQi Wu ◽

MengChu Zhou ◽

Feng Chu ◽

Chengbin Chu

Keyword(s):

Petri Net ◽

Scheduling Strategy ◽

Cluster Tools ◽

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Schedulability and Scheduling of Dual-Arm Cluster Tools with Residency Time Constraints Based on Petri Net

2006 IEEE International Conference on Automation Science and Engineering ◽

10.1109/coase.2006.326860 ◽

2006 ◽

Author(s):

Naiqi Wu ◽

Mengchu Zhou

Keyword(s):

Petri Net ◽

Time Constraints ◽

Cluster Tools ◽

Dual Arm ◽

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Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmca.2012.2187890 ◽

2013 ◽

Vol 43 (1) ◽

pp. 196-207 ◽

Author(s):

NaiQi Wu ◽

Feng Chu ◽

Chengbin Chu ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Time Analysis ◽

Cluster Tools ◽

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Petri net-based scheduling of time-constrained dual-arm cluster tools with bounded activity time variation

2010 IEEE International Conference on Automation Science and Engineering ◽

10.1109/coase.2010.5584183 ◽

2010 ◽

Author(s):

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Time Variation ◽

Activity Time ◽

Cluster Tools ◽

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Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy

2011 IEEE International Conference on Robotics and Automation ◽

10.1109/icra.2011.5980119 ◽

2011 ◽

Author(s):

NaiQi Wu ◽

Feng Chu ◽

Chengbin Chu ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Time Analysis ◽

Cluster Tools ◽

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A Petri Net-Based Novel Scheduling Approach and Its Cycle Time Analysis for Dual-Arm Cluster Tools With Wafer Revisiting

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2012.2222945 ◽

2013 ◽

Vol 26 (1) ◽

pp. 100-110 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Time Analysis ◽

Cluster Tools ◽

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Petri net modeling and real-time control of dual-arm cluster tools with residency time constraint and activity time variations

2008 IEEE International Conference on Automation Science and Engineering ◽

10.1109/coase.2008.4626482 ◽

2008 ◽

Author(s):

NaiQi Wu ◽

MengChu Zhou ◽

ShihSen Peng ◽

Feng Chu ◽

Chengbin Chu

Keyword(s):

Real Time ◽

Petri Net ◽

Time Constraint ◽

Activity Time ◽

Real Time Control ◽

Time Control ◽

Cluster Tools ◽

Time Variations ◽

Dual Arm ◽

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An Event Graph Based Simulation and Scheduling Analysis of Multi-Cluster Tools

Proceedings of the 2004 Winter Simulation Conference, 2004. ◽

10.1109/wsc.2004.1371549 ◽

2005 ◽

Author(s):

Shengwei Ding ◽

Jiangang Yi

Keyword(s):

Scheduling Analysis ◽

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