Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing

Author(s):  
Gloria Luz Rodriguez Verjan ◽  
Stephane Dauzere-Peres ◽  
Jacques Pinaton
2022 ◽  
pp. 579-620
Author(s):  
Zhongda Du ◽  
Shukun Wang ◽  
Haitao Li ◽  
Xin You ◽  
Yongsheng Shi
Keyword(s):  

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