The production or generation of SE by focused, fast electron beams is a multistage process which includes excitation of target electrons by the energetic incident beam, subsequent decay yielding hot SE, transport to the surface, and transmission over the surface potential barrier. The ultimate spatial resolution of a SE image formed by scanning a well focussed probe across a surface is limited by the excitation events' spatial derealization through the transverse momentum transferred to the specimen.The accepted model for SE production is not well characterized since it is extremely difficult to separate experimentally the generation, transport and transmission processes during a given SE creation event. Here, we examine the SE generation pathway by correlating SE of a given energy produced by an initial inelastic excitation using time coincidence detection. This technique can be used, for example, to isolate the role of plasmon decay in the SE generation process. The experiments were performed in a Vacuum Generators HB501-S UHV scanning transmission electron microscope (STEM), operating at base pressures of 5 × 10−11 torr.