Unique cryogenic pumping array for low sticking coefficient gas flows

2010 ◽  
Vol 28 (6) ◽  
pp. 1356-1362
Author(s):  
Cedrick Ngalande ◽  
Andrew D. Ketsdever
1992 ◽  
Vol 280 ◽  
Author(s):  
Daniel G. Coronell ◽  
Klavs F. Jensen

ABSTRACTA Monte Carlo simulation approach has been developed to model transport and film profile evolution for rarefied gas flows during nonplanar CVD over trenches and contact holes. A systematic study of the effect of various parameters on the film conformality including intermolecular collisions, reactant sticking coefficient and feature geometry is reported.


Author(s):  
R. T. K. Baker ◽  
R. D. Sherwood

The catalytic gasification of carbon at high temperature by microscopic size metal particles is of fundamental importance to removal of coke deposits and conversion of refractory hydrocarbons into fuels and chemicals. The reaction of metal/carbon/gas systems can be observed by controlled atmosphere electron microscopy (CAEM) in an 100 KV conventional transmission microscope. In the JEOL gas reaction stage model AGl (Fig. 1) the specimen is positioned over a hole, 200μm diameter, in a platinum heater strip, and is interposed between two apertures, 75μm diameter. The control gas flows across the specimen and exits through these apertures into the specimen chamber. The gas is further confined by two apertures, one in the condenser and one in the objective lens pole pieces, and removed by an auxiliary vacuum pump. The reaction zone is <1 mm thick and is maintained at gas pressure up to 400 Torr and temperature up to 1300<C as measured by a Pt-Pt/Rh 13% thermocouple. Reaction events are observed and recorded on videotape by using a Philips phosphor-television camera located below a hole in the center of the viewing screen. The overall resolution is greater than 2.5 nm.


Equipment ◽  
2006 ◽  
Author(s):  
Aleksey V. Nenarokomov ◽  
O. M. Alifanov ◽  
E. A. Artioukhine ◽  
I. V. Repin

AIAA Journal ◽  
1998 ◽  
Vol 36 ◽  
pp. 1842-1847 ◽  
Author(s):  
Brady P. Brown ◽  
Brian M. Argrow
Keyword(s):  

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