Full-chip GPU-accelerated curvilinear EUV dose and shape correction

2017 ◽  
Author(s):  
Aki Fujimura ◽  
Oleg Syrel ◽  
Ali Bouaricha ◽  
Mariusz Niewczas ◽  
Bo Su ◽  
...  
Keyword(s):  
Author(s):  
Yuliang Jiang ◽  
Hao Zha ◽  
Ping Wang ◽  
Jiaru Shi ◽  
Huaibi Chen ◽  
...  

2010 ◽  
Author(s):  
Keith Patterson ◽  
Sergio Pellegrino ◽  
James Breckinridge

2018 ◽  
Vol 49 (5) ◽  
pp. 1823-1840 ◽  
Author(s):  
Carlos M. Travieso ◽  
Antonio G. Ravelo-García ◽  
Jesús B. Alonso ◽  
José M. Canino-Rodríguez ◽  
Malay Kishore Dutta
Keyword(s):  

IEEE Access ◽  
2020 ◽  
Vol 8 ◽  
pp. 131967-131974
Author(s):  
Van Thong Huynh ◽  
Hyung-Jeong Yang ◽  
Guee-Sang Lee ◽  
Soo-Hyung Kim

2019 ◽  
Vol 215 ◽  
pp. 05003
Author(s):  
Rui Almeida ◽  
Timon Ebert ◽  
Rainer Börret ◽  
Mario Pohl

In order to improve the quality of injection-moulded polymer optic parts, it is necessary to improve the quality of the respective steel moulds. For this reason, it is not only necessary to improve the surface roughness of the mould, but also its geometrical shape. The material removal obtained from robot pad polishing is too low. This makes a shape correction after the milling step a very prolonged process. The aim of this work is to use a polishing chain to improve the surface quality of steel samples in terms of shape deviation and surface roughness. This correction polishing chain uses the robot fluid jet polishing for the geometrical shape correction and afterwards the robot pad polishing for the improvement of the surface roughness. Due to the high material removal rates of the fluid jet polishing, it is possible to correct the geometrical shape of steel moulds very fast up to a certain deviation. The pad polishing process improves the surface roughness of the steel samples. A correction of the shape deviation of more than 80% with a RMS of approximately 8 nm was obtained.


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