Photomask Technology
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Published By SPIE

9781510613768, 9781510613775
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

1X HP EUV reticle inspection with a 193nm inspection system

2018 ◽  
Author(s):  
William H. Broadbent ◽  
Sterling Watson ◽  
Pei-Chun Chiang ◽  
Rui-Fang Shi ◽  
Jim-Ren Wang ◽  
...  
Keyword(s):  
Inspection System

scholarly journals Front Matter: Volume 10451

2017 ◽  
Author(s):  
Proceedings of SPIE
Keyword(s):  
Matter Volume

Dimensional measurement sensitivity analysis for a MoSi photomask using DUV reflection scatterfield imaging microscopy

2017 ◽  
Author(s):  
Martin Y. Sohn ◽  
Dong-Ryoung Lee ◽  
Bryan M. Barnes ◽  
Richard M. Silver ◽  
Ronald Dixson ◽  
...  
Keyword(s):  
Sensitivity Analysis ◽  
Measurement Sensitivity ◽  
Dimensional Measurement

Full-chip GPU-accelerated curvilinear EUV dose and shape correction

2017 ◽  
Author(s):  
Aki Fujimura ◽  
Oleg Syrel ◽  
Ali Bouaricha ◽  
Mariusz Niewczas ◽  
Bo Su ◽  
...  
Keyword(s):  
Shape Correction

CLMPC: curvilinear MPC in a mask data preparation flow

2017 ◽  
Author(s):  
Malavika Sharma ◽  
Ingo Bork ◽  
Bhardwaj Durvasula ◽  
Nageswara Rao ◽  
Peter Buck ◽  
...  
Keyword(s):  
Data Preparation

The impact of inconsistency in assist feature generation on OPC performance

2017 ◽  
Author(s):  
Amr Y. Abdo ◽  
Ramya Viswanathan ◽  
Donald J. Samuels ◽  
David Conklin
Keyword(s):  
Feature Generation ◽  
The Impact

Advanced photomask chrome etch: selectivity without sacrifice

2017 ◽  
Author(s):  
Michael Morgan ◽  
Kristen Bevlin ◽  
Dwarakanath Geerpuram ◽  
Russell J. Westerman ◽  
Chris Johnson

scholarly journals EUV optical characterization of alternative membrane materials for EUV pellicles

2017 ◽  
Author(s):  
Frank Scholze ◽  
Christian Laubis ◽  
Marina Y. Timmermans ◽  
Ivan Pollentier ◽  
Emily E. Gallagher ◽  
...  
Keyword(s):  
Optical Characterization ◽  
Membrane Materials

Automatic SRAF printing detection based on contour extraction

2017 ◽  
Author(s):  
Liang Cao ◽  
Jie Zhang ◽  
Wenchao Jiang ◽  
Dong Qing Zhang ◽  
Wei-long Wang ◽  
...  
Keyword(s):  
Contour Extraction
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