Review and characterization of defects after automatic optical inspection on patterned wafers

Author(s):  
Pascal Bichebois ◽  
Pascal Perret ◽  
Herve M. Martin ◽  
Alain Brun ◽  
Daniel Burlet
2014 ◽  
Vol 29 (1) ◽  
pp. 34-39
Author(s):  
张铁轶 ZHANG Tie-yi ◽  
余道平 YU Dao-ping ◽  
王野 WANG Ye ◽  
刘超强 LIU Chao-qiang ◽  
张祥 ZHANG Xiang

2020 ◽  
Vol 43 ◽  
pp. 101004 ◽  
Author(s):  
Wenting Dai ◽  
Abdul Mujeeb ◽  
Marius Erdt ◽  
Alexei Sourin

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