Localized source and mask optimization with narrow-band level-set method
2006 ◽
Vol 53
(11)
◽
pp. 2257-2264
◽
2014 ◽
Vol 273
◽
pp. 12-37
◽
Keyword(s):
Keyword(s):
2013 ◽
Vol 401-403
◽
pp. 1027-1030
2005 ◽
Vol 63
(10)
◽
pp. 1478-1512
◽
2005 ◽
pp. 1006-1013
◽
Keyword(s):
2013 ◽
Vol E96.A
(8)
◽
pp. 1744-1751