Optical Microlithography XXXII
Latest Publications

TOTAL DOCUMENTS

29
(FIVE YEARS 0)

H-INDEX

1
(FIVE YEARS 0)

Published By SPIE

9781510625693, 9781510625709
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Productivity improvement by module life extension with software approach using Availability MAXimization (AMAX) functionality

2020 ◽  
Author(s):  
Futoshi Sato ◽  
Sophia Hu ◽  
Toshihiro Oga ◽  
Taku Yamazaki
Keyword(s):  
Life Extension ◽  
Productivity Improvement ◽  
Availability Maximization

Full-chip application of machine learning SRAFs on DRAM case using auto pattern selection

2019 ◽  
Author(s):  
Kunyuan Chen ◽  
Andy Lan ◽  
Richer Yang ◽  
Vincent Chen ◽  
Shulu Wang ◽  
...  
Keyword(s):  
Machine Learning ◽  
Pattern Selection

Metrology and deep learning integrated solution to drive OPC model accuracy improvement

2019 ◽  
Author(s):  
Wei Yuan ◽  
Yifei Lu ◽  
Yuhang Zhao ◽  
Shoumian Chen ◽  
Ming Li ◽  
...  
Keyword(s):  
Deep Learning ◽  
Model Accuracy ◽  
Accuracy Improvement

Extremely long life excimer laser chamber technology for multi-patterning lithography

2019 ◽  
Author(s):  
Hiroaki Tsushima ◽  
Yousuke Fujimaki ◽  
Yasuaki Kiyota ◽  
Makoto Tanaka ◽  
Takashi Itou ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Long Life

Improved validation and optimization of physics-based NTD compact modeling flows

2019 ◽  
Author(s):  
Folarin Latinwo ◽  
Delian Yang ◽  
Cheng-En Wu ◽  
Peter Brooker ◽  
Yulu Chen ◽  
...  
Keyword(s):  
Compact Modeling

SRAF rule extraction and insertion based on inverse lithography technology

2019 ◽  
Author(s):  
Xiaojing Su ◽  
Pengzheng Gao ◽  
Yayi Wei ◽  
Weijie Shi
Keyword(s):  
Rule Extraction ◽  
Inverse Lithography Technology ◽  
Lithography Technology

Modeling of dynamic image performance for lithographic projection lens

2019 ◽  
Author(s):  
Zhiyong Yang ◽  
Yating Shi ◽  
Hao Jiang ◽  
Shiyuan Liu
Keyword(s):  
Projection Lens ◽  
Dynamic Image ◽  
Image Performance

Investigation on MBOPC convergence improvement with location-dependent correction factors aided by machine learning

2019 ◽  
Author(s):  
Sheng-Wei Chien ◽  
Jia-Syun Cai ◽  
Chien-Lin Lee ◽  
Kuen-Yu Tsai ◽  
James P. Shiely ◽  
...  
Keyword(s):  
Machine Learning ◽  
Correction Factors

Optimal feature vector design for computational lithography

2019 ◽  
Author(s):  
Xuelong Shi ◽  
Yuhang Zhao ◽  
Shoumian Cheng ◽  
Ming Li ◽  
Wei Yuan ◽  
...  
Keyword(s):  
Feature Vector ◽  
Optimal Feature
Load More ...
Sign in / Sign up

Export Citation Format

Share Document