Isotropic plasma free Si trim for FinFET to GAA device architectures (Conference Presentation)

Author(s):  
Subhadeep Kal ◽  
Yusuke Oniki ◽  
Cheryl Alix ◽  
Karine Kenis ◽  
Efrain Altamirano-Sánchez ◽  
...  
Keyword(s):  
2015 ◽  
Vol 5 (5) ◽  
pp. 1224 ◽  
Author(s):  
M. Z. Yaqoob ◽  
A. Ghaffar ◽  
Majeed A.S. Alkanhal ◽  
I. Shakir ◽  
Q. A. Naqvi

1968 ◽  
Vol 36 (12) ◽  
pp. 1117-1122 ◽  
Author(s):  
R. Habert ◽  
S. N. Samaddar

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