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X-ray refractive glass microlenses produced by ion beam lithography
EUV and X-ray Optics, Sources, and Instrumentation
◽
10.1117/12.2589310
◽
2021
◽
Author(s):
Polina Medvedskaya
◽
Ivan Lyatun
◽
K. Golubenko
◽
Vyacheslav Yunkin
◽
Irina Snigireva
◽
...
Keyword(s):
Ion Beam
◽
X Ray
◽
Ion Beam Lithography
Download Full-text
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References
Sub-100-nm x-ray mask technology using focused-ion-beam lithography
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.584493
◽
1989
◽
Vol 7
(6)
◽
pp. 1583
◽
Cited By ~ 11
Author(s):
W. Chu
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
X Ray
◽
Ion Beam Lithography
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Kinoform Optics: Single-Step 3D Nanofabrication of Kinoform Optics via Gray-Scale Focused Ion Beam Lithography for Efficient X-Ray Focusing (Advanced Optical Materials 6/2015)
Advanced Optical Materials
◽
10.1002/adom.201570035
◽
2015
◽
Vol 3
(6)
◽
pp. 791-791
◽
Cited By ~ 1
Author(s):
Kahraman Keskinbora
◽
Corinne Grévent
◽
Michael Hirscher
◽
Markus Weigand
◽
Gisela Schütz
Keyword(s):
Optical Materials
◽
Focused Ion Beam
◽
Ion Beam
◽
Single Step
◽
Gray Scale
◽
X Ray
◽
Ion Beam Lithography
Download Full-text
Comparison of Optical, X-ray, Electron and Ion Beam Lithography
Microelectronic Engineering
◽
10.1016/0167-9317(89)90068-3
◽
1989
◽
Vol 9
(1-4)
◽
pp. 297-304
◽
Cited By ~ 4
Author(s):
Shinji Okazaki
Keyword(s):
Ion Beam
◽
X Ray
◽
Ion Beam Lithography
Download Full-text
Ion beam lithography for coherent x-ray optics application
Advances in X-Ray/EUV Optics and Components XV
◽
10.1117/12.2568427
◽
2020
◽
Author(s):
Polina Medvedskaya
◽
Ivan Lyatun
◽
Sergey Shevyrtalov
◽
M. Polikarpov
◽
Irina Snigireva
◽
...
Keyword(s):
Ion Beam
◽
Ray Optics
◽
X Ray
◽
Ion Beam Lithography
Download Full-text
Single-Step 3D Nanofabrication of Kinoform Optics via Gray-Scale Focused Ion Beam Lithography for Efficient X-Ray Focusing
Advanced Optical Materials
◽
10.1002/adom.201400411
◽
2015
◽
Vol 3
(6)
◽
pp. 792-800
◽
Cited By ~ 7
Author(s):
Kahraman Keskinbora
◽
Corinne Grévent
◽
Michael Hirscher
◽
Markus Weigand
◽
Gisela Schütz
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Single Step
◽
Gray Scale
◽
X Ray
◽
Ion Beam Lithography
Download Full-text
Rapid Prototyping of Fresnel Zone PlatesviaDirect Ga+Ion Beam Lithography for High-Resolution X-ray Imaging
ACS Nano
◽
10.1021/nn403295k
◽
2013
◽
Vol 7
(11)
◽
pp. 9788-9797
◽
Cited By ~ 37
Author(s):
Kahraman Keskinbora
◽
Corinne Grévent
◽
Ulrike Eigenthaler
◽
Markus Weigand
◽
Gisela Schütz
Keyword(s):
High Resolution
◽
Rapid Prototyping
◽
Fresnel Zone
◽
Ion Beam
◽
X Ray
◽
Ion Beam Lithography
◽
X Ray Imaging
Download Full-text
Focused ion beam lithography using Al2O3 as a resist for fabrication of x-ray masks
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.584702
◽
1989
◽
Vol 7
(1)
◽
pp. 89
◽
Cited By ~ 7
Author(s):
Tsuneaki Ohta
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
X Ray
◽
Ion Beam Lithography
Download Full-text
Ion beam lithography for Fresnel zone plates in X-ray microscopy
Optics Express
◽
10.1364/oe.21.011747
◽
2013
◽
Vol 21
(10)
◽
pp. 11747
◽
Cited By ~ 28
Author(s):
Kahraman Keskinbora
◽
Corinne Grévent
◽
Michael Bechtel
◽
Markus Weigand
◽
Eberhard Goering
◽
...
Keyword(s):
Fresnel Zone
◽
Ion Beam
◽
Fresnel Zone Plates
◽
X Ray
◽
Ion Beam Lithography
◽
Zone Plates
Download Full-text
Ion beam lithography for direct patterning of high accuracy large area X-ray elements in gold on membranes
Microelectronic Engineering
◽
10.1016/j.mee.2012.07.036
◽
2012
◽
Vol 98
◽
pp. 198-201
◽
Cited By ~ 17
Author(s):
A. Nadzeyka
◽
L. Peto
◽
S. Bauerdick
◽
M. Mayer
◽
K. Keskinbora
◽
...
Keyword(s):
Ion Beam
◽
High Accuracy
◽
Large Area
◽
X Ray
◽
Ion Beam Lithography
◽
Direct Patterning
◽
Area X
Download Full-text
Nanofabrication of diffractive elements for soft x-ray and extreme ultraviolet applications using ion beam lithography
Applied Physics Letters
◽
10.1063/1.3258655
◽
2009
◽
Vol 95
(19)
◽
pp. 191118
◽
Cited By ~ 5
Author(s):
Johannes Lenz
◽
Thomas Wilhein
◽
Stephan Irsen
Keyword(s):
Extreme Ultraviolet
◽
Ion Beam
◽
X Ray
◽
Ion Beam Lithography
Download Full-text
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