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Self-aligned double patterning process for sub-15nm nanoimprint template fabrication
Mapping Intimacies
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10.1117/12.2603907
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2021
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Author(s):
Yoshinori Kagawa
◽
Machiko Suenaga
◽
Hikaru Sasaki
◽
Koji Murano
◽
Shunko Magoshi
◽
...
Keyword(s):
Double Patterning
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Cited By
References
Simultaneous layout migration and decomposition for double patterning technology
Proceedings of the 2009 International Conference on Computer-Aided Design - ICCAD '09
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10.1145/1687399.1687510
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2009
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Cited By ~ 18
Author(s):
Chin-Hsiung Hsu
◽
Yao-Wen Chang
◽
Sani Rechard Nassif
Keyword(s):
Double Patterning
Download Full-text
Diffraction-based overlay for spacer patterning and double patterning technology
10.1117/12.870473
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2011
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Author(s):
Byoung Hoon Lee
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JeongSu Park
◽
Jongsu Lee
◽
Sarohan Park
◽
ChangMoon Lim
◽
...
Keyword(s):
Double Patterning
Download Full-text
Advanced aberration control in projection optics for double patterning
10.1117/12.813625
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2009
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Cited By ~ 5
Author(s):
Toshiyuki Yoshihara
◽
Takashi Sukegawa
◽
Nobuhiko Yabu
◽
Masatoshi Kobayashi
◽
Tadashi Arai
◽
...
Keyword(s):
Double Patterning
◽
Projection Optics
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Nanochannel fabrication based on double patterning with hydrogen silsesquioxane
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
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10.1116/1.4906486
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2015
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Vol 33
(2)
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pp. 020601
Author(s):
Kenneth Diest
◽
Russell Goodman
◽
Mordechai Rothschild
Keyword(s):
Hydrogen Silsesquioxane
◽
Double Patterning
Download Full-text
A lithographic and process assessment of photoresist stabilization for double-patterning using 172-nm photoresist curing
10.1117/12.774205
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2008
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Cited By ~ 8
Author(s):
Nikolaos Bekiaris
◽
Hiram Cervera
◽
Junyan Dai
◽
Ryoung-han Kim
◽
Alden Acheta
◽
...
Keyword(s):
Process Assessment
◽
Double Patterning
Download Full-text
Enabling 35nm double patterning contact imaging using a novel CD shrink process
10.1117/12.774988
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2008
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Author(s):
Yoshiaki Yamada
◽
Michael M. Crouse
◽
Shannon Dunn
◽
Tetsu Kawasaki
◽
Satoru Shimura
◽
...
Keyword(s):
Double Patterning
◽
Contact Imaging
Download Full-text
Track optimization and control for 32nm node double patterning and beyond
10.1117/12.814849
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2009
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Cited By ~ 1
Author(s):
David Laidler
◽
Craig Rosslee
◽
Koen D'havé
◽
Philippe Leray
◽
Len Tedeschi
Keyword(s):
Optimization And Control
◽
Double Patterning
◽
And Control
Download Full-text
SOI layout decomposition for double patterning lithography on high-performance computer platforms
10.1117/12.2180809
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2014
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Author(s):
Vladimir Verstov
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Lyudmila Zinchenko
◽
Vladimir Makarchuk
Keyword(s):
High Performance
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Double Patterning
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High Performance Computer
Download Full-text
XLR 600i: recirculating ring ArF light source for double patterning immersion lithography
10.1117/12.776927
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2008
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Cited By ~ 3
Author(s):
Vladimir Fleurov
◽
Slava Rokitski
◽
Robert Bergstedt
◽
Hong Ye
◽
Kevin O’Brien
◽
...
Keyword(s):
Light Source
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Immersion Lithography
◽
Double Patterning
Download Full-text
Anti-spacer double patterning
10.1117/12.2045617
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2014
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Author(s):
Michael Hyatt
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Karen Huang
◽
Anton DeVilliers
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Mark Slezak
◽
Zhi Liu
Keyword(s):
Double Patterning
Download Full-text
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