Fast lithographic source pupil optimization using difference of convex functions algorithm for transformed L1 penalty

2021 ◽  
Author(s):  
Yiyu Sun ◽  
Yanqiu Li ◽  
Guanghui Liao ◽  
Miao Yuan ◽  
Yang Liu ◽  
...  
2014 ◽  
Vol 59 (8) ◽  
pp. 2277-2282 ◽  
Author(s):  
Tao Pham Dinh ◽  
Hoai Minh Le ◽  
Hoai An Le Thi ◽  
Fabien Lauer

Optimization ◽  
2019 ◽  
Vol 69 (7-8) ◽  
pp. 1601-1633
Author(s):  
Nguyen Mau Nam ◽  
Le Thi Hoai An ◽  
Daniel Giles ◽  
Nguyen Thai An

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