The interaction between femtoseocnd laser and transparent materials has been studied intensively in recent years. When the femtosecond laser was focused onto the surface of the transparent materials, if the laser fluence applied to the sample exceeds the material’s fluence threshold, ablation occurs. In this paper, we study the surface ablation of lithium niobate by femtosecond laser. We produced a two-dimensional array of voids in the sample surface by varying the number of shots and laser energy, and analyze of the damage depth with the relation to the pulse energy and the number of the pulse. It has important reference on the microfabrication in such materials by femtosecond laser.
