Effective extreme ultraviolet radiation source based on laser-produced plasma in supersonic xenon jet

2007 ◽  
Author(s):  
S. V. Bobashev ◽  
I. V. Domracheva ◽  
M. V. Petrenko ◽  
G. K. Tumakaev ◽  
Z. A. Stepanova
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

Physics of Laser-Produced Plasma Sources of Extreme Ultraviolet Radiation

2018 ◽  
Author(s):  
Oscar Versolato ◽  
Dmitry Kurilovich ◽  
Francesco Torretti ◽  
Ruben Schupp ◽  
Joris Scheers ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

scholarly journals Errata: RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

2012 ◽  
Vol 11 (2) ◽  
pp. 029802-1 ◽  
Author(s):  
Konstantin N. Koshelev ◽  
Vladimir V. Ivanov ◽  
Vladimir G. Novikov ◽  
Viacheslav Medvedev ◽  
Alexander S. Grushin ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

Development of Xe-filled capillary discharge extreme-ultraviolet radiation source for semiconductor lithography

2003 ◽  
Author(s):  
Yusuke Teramoto ◽  
Hiroto Sato ◽  
Kazunori Bessho ◽  
Koji Miyauchi ◽  
Mitsuru Ikeuchi ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Capillary Discharge ◽  
Extreme Ultraviolet Radiation

An extreme ultraviolet radiation source based on plasma heated by millimeter range radiation

2011 ◽  
Vol 75 (1) ◽  
pp. 64-66 ◽  
Author(s):  
A. V. Vodopyanov ◽  
S. V. Golubev ◽  
D. A. Mansfeld ◽  
N. N. Salashchenko ◽  
N. I. Chkhalo
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Radiation

RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

2012 ◽  
Vol 11 (2) ◽  
pp. 021112-1 ◽  
Author(s):  
Konstantin N. Koshelev ◽  
Vladimir V. Ivanov ◽  
Vladimir G. Novikov ◽  
Viacheslav Medvedev ◽  
Alexander S. Grushin ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation
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