A high-power short-pulse laser for EUV source generation using laser-produced plasma and achieving low cost of ownership

2004 ◽  
Author(s):  
Andy J. Comley ◽  
Samir Ellwi ◽  
Nick Hay ◽  
Michael F. Brownell
Keyword(s):  
Pulse Laser ◽  
High Power ◽  
Short Pulse ◽  
Low Cost ◽  
Short Pulse Laser ◽  
Cost Of Ownership ◽  
Laser Produced Plasma

High-power short-pulse laser modules for laser-produced-plasma EUV source

2004 ◽  
Author(s):  
Samir Ellwi ◽  
Andrew Comley ◽  
N. Hay ◽  
Michael Brownell
Keyword(s):  
Pulse Laser ◽  
High Power ◽  
Short Pulse ◽  
Short Pulse Laser ◽  
Laser Produced Plasma

High-power short-pulse laser repetition rate improvement by adaptive wave front correction

2004 ◽  
Vol 75 (12) ◽  
pp. 5186-5192 ◽  
Author(s):  
B. Wattellier ◽  
J. Fuchs ◽  
J. P. Zou ◽  
K. Abdeli ◽  
C. Haefner ◽  
...  
Keyword(s):  
Wave Front ◽  
Pulse Laser ◽  
High Power ◽  
Repetition Rate ◽  
Short Pulse ◽  
Laser Repetition Rate ◽  
Short Pulse Laser ◽  
Rate Improvement

Broadening and Amplification Characteristics of Fiber Front End for High-Power Short Pulse Laser Facility

2009 ◽  
Vol 36 (1) ◽  
pp. 160-165
Author(s):  
张锐 Zhang Rui ◽  
王建军 Wang Jianjun ◽  
林宏奂 Lin Honghuan ◽  
李明中 Li Mingzhong ◽  
车雅良 Che Yaliang ◽  
...  
Keyword(s):  
Pulse Laser ◽  
High Power ◽  
Short Pulse ◽  
Short Pulse Laser ◽  
Front End ◽  
Laser Facility

Short-pulse laser-produced plasma from C60 molecules

1995 ◽  
Author(s):  
Cornelius Wülker ◽  
Wolfgang Theobald ◽  
Donald Ouw ◽  
Fritz P. Schäfer ◽  
Boris N. Chichkov
Keyword(s):  
Pulse Laser ◽  
Short Pulse ◽  
Short Pulse Laser ◽  
Laser Produced Plasma

Yb doped Fluorides for High Power and Short-Pulse Laser Applications

2011 ◽  
Author(s):  
Frédéric Druon ◽  
Sandrine Ricaud ◽  
Dimitris N. Papadopoulos ◽  
Alain Pellegrina ◽  
Marc Hanna ◽  
...  
Keyword(s):  
Pulse Laser ◽  
High Power ◽  
Short Pulse ◽  
Laser Applications ◽  
Short Pulse Laser
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