Nanometrology for MEMS: combination of optical interference, atomic force microscopy, and nanoindentor-based actuator

2006 ◽  
Author(s):  
Marc Jobin ◽  
Philippe Passeraub ◽  
Raphael Foschia
Keyword(s):  
Atomic Force Microscopy ◽  
Optical Interference ◽  
Force Microscopy ◽  
Atomic Force

Optical interference artifacts in contact atomic force microscopy images

2002 ◽  
Vol 92 (3-4) ◽  
pp. 243-250 ◽  
Author(s):  
A Méndez-Vilas ◽  
M.L González-Martı́n ◽  
M.J Nuevo
Keyword(s):  
Atomic Force Microscopy ◽  
Optical Interference ◽  
Force Microscopy ◽  
Atomic Force ◽  
Microscopy Images

Electrostatic Forces on the Surface of Metals as Measured by Atomic Force Microscopy

2000 ◽  
Vol 10 (1-2) ◽  
pp. 15
Author(s):  
Eugene Sprague ◽  
Julio C. Palmaz ◽  
Cristina Simon ◽  
Aaron Watson
Keyword(s):  
Atomic Force Microscopy ◽  
Electrostatic Forces ◽  
Force Microscopy ◽  
Atomic Force
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