Investigation of extreme ultraviolet radiation of highly charged Mo ions from a laser-produced plasma

2021 ◽  
pp. 107946
Author(s):  
Mohammedelnazier Bakhiet ◽  
Maogen Su ◽  
Shiquan Cao ◽  
Yanhong Wu ◽  
Maijuan Li ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

Physics of Laser-Produced Plasma Sources of Extreme Ultraviolet Radiation

2018 ◽  
Author(s):  
Oscar Versolato ◽  
Dmitry Kurilovich ◽  
Francesco Torretti ◽  
Ruben Schupp ◽  
Joris Scheers ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

scholarly journals Errata: RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

2012 ◽  
Vol 11 (2) ◽  
pp. 029802-1 ◽  
Author(s):  
Konstantin N. Koshelev ◽  
Vladimir V. Ivanov ◽  
Vladimir G. Novikov ◽  
Viacheslav Medvedev ◽  
Alexander S. Grushin ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

2012 ◽  
Vol 11 (2) ◽  
pp. 021112-1 ◽  
Author(s):  
Konstantin N. Koshelev ◽  
Vladimir V. Ivanov ◽  
Vladimir G. Novikov ◽  
Viacheslav Medvedev ◽  
Alexander S. Grushin ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

2018 ◽  
Vol 189 (03) ◽  
pp. 323-334 ◽  
Author(s):  
D.B. Abramenko ◽  
P.S. Antsiferov ◽  
D.I. Astakhov ◽  
Aleksandr Yu. Vinokhodov ◽  
Il'ya Yu. Vichev ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Mask Inspection ◽  
Extreme Ultraviolet Radiation
Sign in / Sign up

Export Citation Format

Share Document