Hypersensitive parameter-identifying ring oscillators for lithography process monitoring

2008 ◽  
Author(s):  
Lynn T. Wang ◽  
Wojtek J. Poppe ◽  
Liang-Teck Pang ◽  
Andrew R. Neureuther ◽  
Elad Alon ◽  
...  
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Ring Oscillators ◽  
Lithography Process ◽  
Parameter Identifying

Run time scanner data analysis for HVM lithography process monitoring and stability control

2014 ◽  
Author(s):  
Woong Jae Chung ◽  
Young Ki Kim ◽  
John Tristan ◽  
Jeong Soo Kim ◽  
Lokesh Subramany ◽  
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Keyword(s):  
Data Analysis ◽  
Process Monitoring ◽  
Stability Control ◽  
Scanner Data ◽  
Lithography Process ◽  
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Functional versus schematic overview displays: Impact on operator situation awareness in process monitoring

2010 ◽  
Author(s):  
Anand Tharanathan ◽  
Jason Laberge ◽  
Peter Bullemer ◽  
Dal Vernon Reising ◽  
Rich McLain
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Process Monitoring ◽  
Situation Awareness ◽  
Functional Versus

User-friendly statistical concepts for process monitoring

1998 ◽  
Vol 49 (9) ◽  
pp. 976-985
Author(s):  
M Wood ◽  
N Capon ◽  
and M Kaye
Keyword(s):  
Process Monitoring ◽  
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Studies on Couplings of SET Ring Oscillators for In-Phase Oscillation and Clock Distribution

2014 ◽  
Vol 1 ◽  
pp. 930-933
Author(s):  
Haruka Noda ◽  
Keisuke Nagata ◽  
Hisato Fujisaka ◽  
Takeshi Kamio ◽  
Kazuhisa Haeiwa
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Ring Oscillators ◽  
Clock Distribution ◽  
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2010 ◽  
Vol 130 (11) ◽  
pp. 1987-1993
Author(s):  
Makoto Ono ◽  
Hirohito Hayashi ◽  
Akira Kondo ◽  
Daisuke Hamaguchi ◽  
Shun'ichi Kaneko
Keyword(s):  
Process Monitoring ◽  
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