Experimental Observation of the Confinement of Atomic Collision Cascades during Ion Sputtering of Porous Silicon

2019 ◽  
Vol 45 (1) ◽  
pp. 37-40 ◽  
Author(s):  
A. E. Ieshkin ◽  
A. B. Tolstoguzov ◽  
S. E. Svyakhovskiy ◽  
M. N. Drozdov ◽  
V. O. Pelenovich
2002 ◽  
Vol 29 (10-12) ◽  
pp. 679-685
Author(s):  
W. H. ZHENG ◽  
LERONDEL G. ◽  
REECE P. ◽  
MULDERS J. ◽  
GAL M.

Author(s):  
А.Е. Иешкин ◽  
А.Б. Толстогузов ◽  
C.Е. Свяховский ◽  
М.Н. Дроздов ◽  
В.О. Пеленович

AbstractResults of investigation of the mass spectra of secondary ions sputtered from bulk (continuous) and porous silicon targets with various characteristic core particle dimensions are presented. It has been established that the sputtering of nanostructured Si samples leads to a significant increase in the relative yield of massive cluster ions. This effect is especially pronounced when the characteristic nanoparticle size approaches the range of bombarding ions in the Si target. The obtained results are explained taking into account the confinement of atomic collision cascades.


JETP Letters ◽  
2005 ◽  
Vol 81 (11) ◽  
pp. 548-550 ◽  
Author(s):  
S. A. Gavrilov ◽  
V. I. Grafutin ◽  
O. V. Ilyukhina ◽  
G. G. Myasishcheva ◽  
E. P. Prokop’ev ◽  
...  

1992 ◽  
Vol 2 (4) ◽  
pp. 365-369 ◽  
Author(s):  
Pablo Jensen ◽  
Patrice Melinon ◽  
Alain Hoareau ◽  
Jian Xiong Hu ◽  
Michel Treilleux ◽  
...  

1993 ◽  
Vol 03 (C5) ◽  
pp. 355-358 ◽  
Author(s):  
G. FISHMAN ◽  
R. ROMESTAIN ◽  
J. C. VIAL

Author(s):  
E. A. Gosteva ◽  
V. V. Starkov ◽  
Yu. N. Parhomenko ◽  
M. O. Kah ◽  
I. A. Iwe
Keyword(s):  

2015 ◽  
Vol 30 (4) ◽  
pp. 351 ◽  
Author(s):  
HUANG Yan-Hua ◽  
HAN Xiang ◽  
CHEN Hui-Xin ◽  
CHEN Song-Yan ◽  
YANG Yong

Sign in / Sign up

Export Citation Format

Share Document