In this work, we study experimentally the effect of the geometry parameters of saw-tooth surface and micro-part on the motion of micro-parts. The experiments are performed for a range of saw-tooth pitch,p, micro-part length,l, and exciting frequency applied to the surface,f. By the use of particle tracking velocimetry method, we can achieve time-dependent velocity, and then ensemble-averaged velocity of the micro-parts. The results show that for differentlandpbut the same relative scalel/p, the profiles of micro-part velocity against the characteristic surface velocitypfare similar. However, they shift alongpfaxis depending onp. Furthermore, the profiles are the similar for the relative scalel/pof 4 to 100. It seems that the motion of micro-part depends on characteristic surface velocitypfthan the relative scalel/pforl/plarger than a certain value.