Radiation Damage Evaluation in Excimer Laser Beam Irradiation and Reactive Ion Etching

1986 ◽  
Vol 25 (Part 1, No. 7) ◽  
pp. 1111-1114 ◽  
Author(s):  
Makoto Sekine ◽  
Haruo Okano ◽  
Kikuo Yamabe ◽  
Nobuo Hayasaka ◽  
Yasuhiro Horiike
Sangyo Igaku ◽  
1988 ◽  
Vol 30 (2) ◽  
pp. 112-120 ◽  
Author(s):  
Sadafumi TAKISE ◽  
Shun'ichi HORIGUCHI ◽  
Ichiro KARAI ◽  
Shinya MATSUMURA ◽  
Makoto HARIMA ◽  
...  

Author(s):  
Toru Takahashi ◽  
Keiko Watanabe ◽  
Akihiro Sasoh ◽  
Hiroyuki Torikai ◽  
Qian-Suo Yang

1987 ◽  
Vol 62 (10) ◽  
pp. 4109-4113 ◽  
Author(s):  
Tohru Hara ◽  
Hidenori Suzuki ◽  
Akio Suga ◽  
Toshiyuki Terada ◽  
Nobuyuki Toyoda

2020 ◽  
Vol 38 (2) ◽  
pp. 60-67
Author(s):  
Hiroyuki OKUDA ◽  
Kazufumi NOMURA ◽  
Satoru ASAI ◽  
Shohei IWATA ◽  
Yasushi KITANI ◽  
...  

1998 ◽  
Vol 27 (6) ◽  
pp. 661-667 ◽  
Author(s):  
C. A. Musca ◽  
J. F. Siliquini ◽  
E. P. G. Smith ◽  
J. M. Dell ◽  
L. Faraone

2007 ◽  
Vol 51 (2) ◽  
pp. 503-508 ◽  
Author(s):  
Youngseop Kim ◽  
Eun Seo Choi ◽  
Wooseop Kwak ◽  
Yongjin Shin

1987 ◽  
Vol 7 (3) ◽  
pp. 236-239 ◽  
Author(s):  
Leslie Serebro ◽  
Trevor Segal ◽  
Daniel Nordenberg ◽  
Colin Gorfil ◽  
Moshe Bar-Lev

2000 ◽  
Vol 30 (7) ◽  
pp. 601-605 ◽  
Author(s):  
Sergei Yu Gus'kov ◽  
N V Zmitrenko ◽  
I V Popov ◽  
Vladislav B Rozanov ◽  
V F Tishkin

Sign in / Sign up

Export Citation Format

Share Document