A Feasibility Study of 50 nm Resolution with Low Energy Electron Beam Proximity Projection Lithography
2002 ◽
Vol 41
(Part 2, No. 1A/B)
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pp. L87-L88
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2005 ◽
Vol 23
(6)
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pp. 2754
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Keyword(s):
1999 ◽
Vol 17
(6)
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pp. 2897
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Keyword(s):
2002 ◽
Vol 20
(6)
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pp. 3021
Keyword(s):
Keyword(s):
2002 ◽
Vol 15
(3)
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pp. 403-409
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Keyword(s):
2004 ◽
Vol 22
(1)
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pp. 136
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Keyword(s):