Effect of Oxygen Impurity on Microstructure and Boron Penetration in a  BF 2  +  Implanted LPCVD Stacked Amorphous Silicon p+ Gated PMOS Capacitor

1995 ◽  
Vol 142 (7) ◽  
pp. 2434-2437 ◽  
Author(s):  
C. ‐Y. Lin ◽  
F. ‐M. Pan ◽  
P. ‐F. Chou ◽  
C. ‐Y. Chang
Author(s):  
Hwan Soo Dow ◽  
Moonkyong Na ◽  
Yeon Wook Jung ◽  
Seung Geun Jo ◽  
Jung Woo Lee

2013 ◽  
Vol 529 ◽  
pp. 50-53 ◽  
Author(s):  
Yang-Shih Lin ◽  
Shui-Yang Lien ◽  
Yung-Chuan Huang ◽  
Chao-Chun Wang ◽  
Chueh-Yang Liu ◽  
...  

1991 ◽  
Vol 59 (17) ◽  
pp. 2130-2132 ◽  
Author(s):  
Akiharu Morimoto ◽  
Minoru Matsumoto ◽  
Masahiro Yoshita ◽  
Minoru Kumeda ◽  
Tatsuo Shimizu

1980 ◽  
Vol 38 (4) ◽  
pp. 349-351
Author(s):  
V. G. Manzhelii ◽  
Yu. A. Freiman ◽  
G. P. Chausov ◽  
V. V. Sumarokov

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