Impact of Millisecond Laser Anneal on the Thermal Stress- Induced Defect Creation in Si1-xGex Source /Drain Junctions

2019 ◽  
Vol 13 (1) ◽  
pp. 23-30 ◽  
Author(s):  
Mireia Bargallo Gonzalez ◽  
Eddy Simoen ◽  
Erik Rosseel ◽  
Peter Verheyen ◽  
Laurent Souriau ◽  
...  
Keyword(s):  
Thermal Stress ◽  
Defect Creation ◽  
Laser Anneal ◽  
Millisecond Laser

Effects of defect creation on bidirectional behavior with hump characteristics of InGaZnO TFTs under bias and thermal stress

2015 ◽  
Vol 54 (3S) ◽  
pp. 03CB03 ◽  
Author(s):  
Hwarim Im ◽  
Hyunsoo Song ◽  
Jaewook Jeong ◽  
Yewon Hong ◽  
Yongtaek Hong
Keyword(s):  
Thermal Stress ◽  
Defect Creation ◽  
Hump Characteristics

Influence of Low Thermal Budget Plasma Oxidation and Millisecond Laser Anneal on Gate Stack Reliability in view of 3D Sequential Integration

2016 ◽  
Author(s):  
C.-M.V. Lu ◽  
C. Fenouillet-Béranger ◽  
R. Gassilloud ◽  
H. Graoui ◽  
D. Larmagnac ◽  
...  
Keyword(s):  
Plasma Oxidation ◽  
Gate Stack ◽  
Thermal Budget ◽  
Laser Anneal ◽  
Low Thermal Budget ◽  
Millisecond Laser

Numerical and experimental study of the thermal stress of silicon induced by a millisecond laser

2011 ◽  
Vol 50 (21) ◽  
pp. 3725 ◽  
Author(s):  
Xi Wang ◽  
Yuan Qin ◽  
Bin Wang ◽  
Liang Zhang ◽  
Zhonghua Shen ◽  
...  
Keyword(s):  
Experimental Study ◽  
Thermal Stress ◽  
Millisecond Laser

Evolution of thermal stress in millisecond laser manufacturing

2021 ◽  
Vol 482 ◽  
pp. 126592
Author(s):  
Tingzhong Zhang ◽  
Chengguang Zhang ◽  
Liang Zhang ◽  
Jin Li
Keyword(s):  
Thermal Stress ◽  
Laser Manufacturing ◽  
Millisecond Laser

Stress Characterization of Selective Epitaxial Si1-xGex Deposition for Embedded Source/Drain Before and After Millisecond Laser Anneal

2019 ◽  
Vol 25 (7) ◽  
pp. 217-227
Author(s):  
Mireia Bargallo Gonzalez ◽  
Tatiana Fernandez-Lanas ◽  
Erik Rosseel ◽  
Andriy Hikavyy ◽  
Harold Dekkers ◽  
...  
Keyword(s):  
Before And After ◽  
Laser Anneal ◽  
Millisecond Laser

Millisecond laser induced thermal stress on GaAs wafer

2017 ◽  
Author(s):  
Bohua Li ◽  
Zhonghua Shen ◽  
Jian Lu ◽  
Xiaowu Ni
Keyword(s):  
Thermal Stress ◽  
Gaas Wafer ◽  
Millisecond Laser
Sign in / Sign up

Export Citation Format

Share Document