Not Your Ordinary Etching: Metal-Assisted Chemical Etch (MacEtch) for
III-V and Wide Bandgap Semiconductors
2010 ◽
Vol 130
(6)
◽
pp. 911-911
2011 ◽
Vol 284
(21)
◽
pp. 5199-5202
◽
Keyword(s):
2002 ◽
Vol 10
(5)
◽
pp. 345-353
◽
Keyword(s):