Not Your Ordinary Etching: Metal-Assisted Chemical Etch (MacEtch) for III-V and Wide Bandgap Semiconductors

2015 ◽  
Vol 2015 ◽  
pp. 1-2
Author(s):  
Meiyong Liao ◽  
Thomas Stergiopoulos ◽  
Jose Alvarez ◽  
Surojit Chattopadhyay ◽  
Guihua Zhang

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