Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3245991 ◽

2009 ◽

Vol 27 (6) ◽

pp. 2635 ◽

Cited By ~ 21

Author(s):

Sung-Wook Nam ◽

Michael J. Rooks ◽

Joel K. W. Yang ◽

Karl K. Berggren ◽

Hyun-Mi Kim ◽

...

Keyword(s):

Contrast Enhancement ◽

Hydrogen Silsesquioxane

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Design of a multiple-electron-beam imaging technique for surface inspection

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3253611 ◽

2009 ◽

Vol 27 (6) ◽

pp. 3256

Author(s):

T. Luo ◽

A. Khursheed ◽

M. Osterberg ◽

H. Hoang

Keyword(s):

Electron Beam ◽

Imaging Technique ◽

Surface Inspection

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Interface dependent electrical properties of amorphous InGaZnO[sub 4] thin film transistors

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3058717 ◽

2009 ◽

Vol 27 (1) ◽

pp. 126 ◽

Cited By ~ 8

Author(s):

Wantae Lim ◽

Jung Hun Jang ◽

S.-H. Kim ◽

D. P. Norton ◽

V. Craciun ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Transistors ◽

Amorphous Ingazno

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Carbon nanotube array vias for interconnect applications

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3123330 ◽

2009 ◽

Vol 27 (3) ◽

pp. 1086 ◽

Cited By ~ 14

Author(s):

Jyh-Hua Ting ◽

Ching-Chieh Chiu ◽

Fuang-Yuan Huang

Keyword(s):

Carbon Nanotube ◽

Nanotube Array ◽

Carbon Nanotube Array

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Synthesis of silicon-containing materials for UV-curable imprint etch barrier solutions

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3179164 ◽

2009 ◽

Vol 27 (4) ◽

pp. 1984 ◽

Cited By ~ 4

Author(s):

Sun-Sik Song ◽

Sang-Mook Kim ◽

Byung-Yeon Choi ◽

Gun-Young Jung ◽

Heon Lee

Keyword(s):

Uv Curable

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Resolution and total blur: Correlation and focus dependencies in e-beam lithography

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3246365 ◽

2009 ◽

Vol 27 (6) ◽

pp. 2722 ◽

Cited By ~ 6

Author(s):

K. Keil ◽

M. Hauptmann ◽

J. Kretz ◽

C. Constancias ◽

L. Pain ◽

...

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Carrier backscattering characteristics of nanoscale strained complementary metal-oxide-semiconductor devices featuring the optimal stress engineering

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3125275 ◽

2009 ◽

Vol 27 (3) ◽

pp. 1261

Author(s):

Shu-Tong Chang ◽

Ming-Han Liao ◽

Chang-Chun Lee ◽

Jacky Huang ◽

Wei-Ching Wang ◽

...

Keyword(s):

Metal Oxide ◽

Semiconductor Devices ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Stress Engineering

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Low-resistance, highly transparent, and thermally stable Ti/ITO Ohmic contacts to n-GaN

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3136922 ◽

2009 ◽

Vol 27 (3) ◽

pp. 1161 ◽

Cited By ~ 6

Author(s):

H. Guo ◽

K. Brown ◽

D. Korakakis ◽

X. A. Cao

Keyword(s):

Ohmic Contacts ◽

Thermally Stable ◽

Low Resistance

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Fast tool servo control for diamond-cutting microstructured optical components

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3086651 ◽

2009 ◽

Vol 27 (3) ◽

pp. 1226 ◽

Cited By ~ 7

Author(s):

H. J. Zhang ◽

S. J. Chen ◽

M. Zhou ◽

Y. H. Yang

Keyword(s):

Servo Control ◽

Fast Tool Servo ◽

Diamond Cutting ◽

Optical Components

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Nanostructure fabrication on an Al surface by chemical and electrochemical multiprocess and nanoscale molecular patterning on the nanostructured Al surface

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3098495 ◽

2009 ◽

Vol 27 (2) ◽

pp. 874 ◽

Cited By ~ 1

Author(s):

Y. Watanabe ◽

H. Kato ◽

S. Takemura ◽

S. Kusama ◽

G. Iimura ◽

...

Keyword(s):

Nanostructure Fabrication ◽

Molecular Patterning

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Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By American Vacuum Society

Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

Design of a multiple-electron-beam imaging technique for surface inspection

Interface dependent electrical properties of amorphous InGaZnO[sub 4] thin film transistors

Carbon nanotube array vias for interconnect applications

Synthesis of silicon-containing materials for UV-curable imprint etch barrier solutions

Resolution and total blur: Correlation and focus dependencies in e-beam lithography

Carrier backscattering characteristics of nanoscale strained complementary metal-oxide-semiconductor devices featuring the optimal stress engineering

Low-resistance, highly transparent, and thermally stable Ti/ITO Ohmic contacts to n-GaN

Fast tool servo control for diamond-cutting microstructured optical components

Nanostructure fabrication on an Al surface by chemical and electrochemical multiprocess and nanoscale molecular patterning on the nanostructured Al surface

Export Citation Format

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and PhenomenaLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By American Vacuum Society

Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

Design of a multiple-electron-beam imaging technique for surface inspection

Interface dependent electrical properties of amorphous InGaZnO[sub 4] thin film transistors

Carbon nanotube array vias for interconnect applications

Synthesis of silicon-containing materials for UV-curable imprint etch barrier solutions

Resolution and total blur: Correlation and focus dependencies in e-beam lithography

Carrier backscattering characteristics of nanoscale strained complementary metal-oxide-semiconductor devices featuring the optimal stress engineering

Low-resistance, highly transparent, and thermally stable Ti/ITO Ohmic contacts to n-GaN

Fast tool servo control for diamond-cutting microstructured optical components

Nanostructure fabrication on an Al surface by chemical and electrochemical multiprocess and nanoscale molecular patterning on the nanostructured Al surface

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Latest Publications