Contact Hole Shrinking of Directed Self-Assembly and Its Application Based on Simulation Approach

2015 ◽  
Vol 15 (10) ◽  
pp. 8183-8186
Author(s):  
Sang-Kon Kim
Keyword(s):  
Self Assembly ◽  
Low Cost ◽  
Process Window ◽  
Optical Proximity Correction ◽  
Lithography Process ◽  
Consistent Field ◽  
Self Consistent Field ◽  
Self Consistent Field Theory ◽  
Thermal Reflow ◽  
Good Agreement

Directed self-assembly (DSA) of block copolymers (BCPs) has become an intense field of study as a complementary technique to conventional lithography for 1×-nm semiconductor patterning. DSA contact hole (C/H) shrinking is a possible implemental technique in the DSA process. In this paper, a DSA C/H shrinking is fully modeled and simulated by using a self-consistent field theory (SCFT). Simulation results show good agreement with experiment results. In terms of this simulation, the potential of DSA C/H shrinking with thermal reflow is integrated into the conventional CMOS lithography process in order to achieve high resolution and pattern density multiplication at a low cost. The optical proximity correction (OPC) of DSA C/H shrinking due to prepattern C/H and pitch can increase process window for DSA C/H shrinking.

Self-consistent field theory investigation of directed self-assembly in cylindrical confinement

2014 ◽  
Vol 53 (2) ◽  
pp. 142-153 ◽  
Author(s):  
Nabil Laachi ◽  
Kris T. Delaney ◽  
Bongkeun Kim ◽  
Su-Mi Hur ◽  
Robert Bristol ◽  
...  
Keyword(s):  
Field Theory ◽  
Self Assembly ◽  
Consistent Field ◽  
Self Consistent ◽  
Self Consistent Field ◽  
Self Consistent Field Theory

The influence of side-chain conformations on the phase behavior of bottlebrush block polymers

Soft Matter ◽  
2020 ◽  
Vol 16 (34) ◽  
pp. 8047-8056
Author(s):  
Yuguo Chen ◽  
Xinghua Zhang ◽  
Ying Jiang
Keyword(s):  
Self Assembly ◽  
Side Chain ◽  
Chain Model ◽  
Block Polymers ◽  
Consistent Field ◽  
Self Consistent Field ◽  
Self Consistent Field Theory ◽  
Assembly Behavior ◽  
Wormlike Chain Model ◽  
Chain Conformations

A self-consistent field theory based on the wormlike chain model is implemented in the investigation of the self-assembly behavior of bottlebrush block polymers in the formation of a lamellar phase.

scholarly journals Dual responsive PMEEECL–PAE block copolymers: a computational self-assembly and doxorubicin uptake study

RSC Advances ◽  
2020 ◽  
Vol 10 (6) ◽  
pp. 3233-3245 ◽  
Author(s):  
Amin Koochaki ◽  
Mohammad Reza Moghbeli ◽  
Sousa Javan Nikkhah ◽  
Alessandro Ianiro ◽  
Remco Tuinier
Keyword(s):  
Block Copolymers ◽  
Self Assembly ◽  
The Self ◽  
Coarse Grained ◽  
Dual Responsive ◽  
Consistent Field ◽  
Self Consistent ◽  
Self Consistent Field ◽  
Self Consistent Field Theory ◽  
Dynamics Simulations

The self-assembly behaviour of dual-responsive block copolymers and their ability to solubilize the drug doxorubicin is demonstrated using molecular dynamics simulations, coarse-grained force field simulations and self-consistent field theory.

Self-consistent field theory of directed self-assembly on chemically prepatterned surfaces

2014 ◽  
Author(s):  
Kenichi Izumi ◽  
Nabil Laachi ◽  
XingKun Man ◽  
Kris T. Delaney ◽  
Glenn H. Fredrickson
Keyword(s):  
Field Theory ◽  
Self Assembly ◽  
Consistent Field ◽  
Self Consistent ◽  
Self Consistent Field ◽  
Self Consistent Field Theory

A simulation study for defects in sub-15 nm line-space using directed self-assembly

2015 ◽  
Vol 1750 ◽  
Author(s):  
Hideki Kanai ◽  
Katsuyoshi Kodera ◽  
Yuriko Seino ◽  
Hironobu Sato ◽  
Yusuke Kasahara ◽  
...  
Keyword(s):  
Field Theory ◽  
Self Assembly ◽  
Neutral Layer ◽  
3 Dimensional ◽  
Consistent Field ◽  
Self Consistent ◽  
Self Consistent Field ◽  
Simulation Results ◽  
Self Consistent Field Theory ◽  
Line Space

ABSTRACTA specific type of buried defect in lamellar phase diblock copolymer was studied by experiments and simulations using self-consistent field theory (SCFT). The defects had 3-dimensional structures and created hexagonally arranged holes. They existed not only on the substrate with the guide structures but in fingerprints. The simulation results suggested that one of the causes of the defects is mismatch of the surface affinity of the neutral layer.

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