optical proximity correction
Recently Published Documents

TOTAL DOCUMENTS

273
(FIVE YEARS 6)

H-INDEX

13
(FIVE YEARS 0)
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Using Machine Learning Methods to Predict the Magnitude and the Direction of Mask Fragments Displacement in Optical Proximity Correction (OPC)

2021 ◽  
Vol 30 (4) ◽  
pp. 291-297
Author(s):  
P. E. Tryasoguzov ◽  
A. V. Kuzovkov ◽  
I. M. Karandashev ◽  
G. S. Teplov
Keyword(s):  
Machine Learning ◽  
Learning Methods ◽  
Optical Proximity Correction ◽  
Machine Learning Methods

Distributed optical proximity correction with deep-learning lithographic model for i-line photolithography

2021 ◽  
Author(s):  
Wei Ping Liao ◽  
Yu Fan Lin ◽  
Hsueh Li Liu ◽  
Shu De Gong Gong ◽  
Peichen Yu ◽  
...  
Keyword(s):  
Deep Learning ◽  
Optical Proximity Correction

scholarly journals Efficient optical proximity correction based on virtual edge and mask pixelation with two-phase sampling

2021 ◽  
Author(s):  
Guodong Chen ◽  
Sikun Li ◽  
Xiangzhao Wang
Keyword(s):  
Two Phase ◽  
Optical Proximity Correction ◽  
Phase Sampling ◽  
Two Phase Sampling

Fast optical proximity correction based on graph convolution network

2021 ◽  
Author(s):  
Shengen Zhang ◽  
Xu Ma ◽  
Junbi Zhang ◽  
Rui Chen ◽  
Yihua Pan ◽  
...  
Keyword(s):  
Optical Proximity Correction

scholarly journals Machine Learning based Optical Proximity Correction Techniques

2020 ◽  
Vol 3 (4) ◽  
pp. 1-8
Author(s):  
Pengpeng Yuan ◽  
◽  
Taian Fan ◽  
Yaobin Feng ◽  
Peng Xu ◽  
...  
Keyword(s):  
Machine Learning ◽  
Optical Proximity Correction

Fast optimization of defect compensation and optical proximity correction for extreme ultraviolet lithography mask

2019 ◽  
Vol 452 ◽  
pp. 169-180 ◽  
Author(s):  
Heng Zhang ◽  
Sikun Li ◽  
Xiangzhao Wang ◽  
Zejiang Meng ◽  
Wei Cheng
Keyword(s):  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Optical Proximity Correction ◽  
Fast Optimization

scholarly journals Efficient optical proximity correction based on semi-implicit additive operator splitting

2019 ◽  
Vol 27 (2) ◽  
pp. 1520 ◽  
Author(s):  
Yijiang Shen ◽  
Fei Peng ◽  
Zhenrong Zhang
Keyword(s):  
Operator Splitting ◽  
Optical Proximity Correction ◽  
Additive Operator ◽  
Additive Operator Splitting
Load More ...
Sign in / Sign up

Export Citation Format

Share Document