1986 ◽  
Vol 71 ◽  
Author(s):  
R. Singh ◽  
J. Nulman

AbstractThis paper summarizes the development in the direction of rapid isothermal processing (RIP) dominated silicon integrated circuit fabrication technology.


1988 ◽  
Vol 28 (4) ◽  
pp. 667
Author(s):  
Louis Anello ◽  
Satish Gupta ◽  
StephenW Kirtley ◽  
GeorgeS Wooster ◽  
RalphL DePrenda

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