Analysis of orthogonal signal of dual-mass micro-machined gyroscope

The dual-mass Silicon micro-machined gyroscope was processed by micro-fabrication technology. It could lead to quadrature coupling error and influence the output of the silicon micro-gyroscope. We select two commonly used gyroscope structures and analyze their quadrature coupling coefficient. Firstly, the complete dynamic model is proposed for the DMSG and the theoretical models of sensitivity and orthogonal signals are given by the dynamic model. Second, the influence of support structure on sensitivity and orthogonal signals are analyzed. The sensitivity and orthogonal signal of the two types of DMSG are derived and compared. The results show that the theoretical accuracy of the sensitivity and orthogonal signals can be improved about 50% and 30% after considering the support structure. The type-B gyroscope are insensitive to the Coriolis force (≈13% reduction) when compared to Type-A gyroscope. On the other hand the type-B gyroscope are insensitive to coupling stiffness (≈85% reduction) when compared to Type-A gyroscope. At last, the reliability of the theory is verified by simulations and experiments.

Novel Fabrication Technology for Clamped Micron-Thick Titanium Diaphragms Used for the Packaging of an Implantable MEMS Acoustic Transducer

Micro-Electro-Mechanical Systems (MEMS) acoustic transducers are highly sophisticated devices with high sensing performance, small size, and low power consumption. To be applied in an implantable medical device, they require a customized packaging solution with a protecting shell, usually made from titanium (Ti), to fulfill biocompatibility and hermeticity requirements. To allow acoustic sound to be transferred between the surroundings and the hermetically sealed MEMS transducer, a compliant diaphragm element needs to be integrated into the protecting enclosure. In this paper, we present a novel fabrication technology for clamped micron-thick Ti diaphragms that can be applied on arbitrary 3D substrate geometry and hence directly integrated into the packaging structure. Stiffness measurements on various diaphragm samples illustrate that the technology enables a significant reduction of residual stress in the diaphragm developed during its deposition on a polymer sacrificial material.

Pectin-Based Scaffolds for Tissue Engineering Applications

Tissue engineering (TE) is an interdisciplinary field that was introduced from the necessity of finding alternative approaches to transplantation for the treatment of damaged and diseased organs or tissues. Unlike the conventional procedures, TE aims at inducing the regeneration of injured tissues through the implantation of customized and functional engineered tissues, built on the so-called ‘scaffolds’. These provide structural support to cells and regulate the process of new tissue formation. The properties of the scaffold are essentials, and they can be controlled by varying the biomaterial formulation and the fabrication technology used to its production. Pectin is emerging as an alternative biomaterial to non-degradable and high-cost petroleum-based biopolymers commonly used in this field. It shows several promising properties including biocompatibility, biodegradability, non-toxicity and gelling capability. Pectin-based formulations can be processed through different fabrication approaches into bidimensional and three-dimensional scaffolds. This chapter aims at highlighting the potentiality in using pectin as biomaterial in the field of tissue engineering. The most representative applications of pectin in preparing scaffolds for wound healing and tissue regeneration are discussed.

Scaled Experiment of the Detonation Control System for the High-Speed Penetration on Concrete

The design scheme and fabrication technology of the detonation control system for the high-speed deep penetration need to be tested for reliability and effectiveness through shooting range tests. However, the shooting range tests of the high-speed deep penetration are so demanding and expensive that it is difficult for the detonation control system to be tested many times. This paper focuses on penetration characteristics of the detonation control system to put forward a laboratory-scaled experiment method with the low impact velocity. Independent parameters of projectile and target affecting the penetration characteristics are effectively analyzed and extracted. A multi-parameter programming method of the scaled experiment for high-speed deep penetration is established. By adjusting the key parameters, the loading conditions of the scaled experiment can be obtained, which can get the comparable deceleration curve with those of the high-speed deep penetration. Finally, the extreme working environment for the detonation control system in the high-speed deep penetration is simulated through the scaled experiment in the laboratory. The scaled experiment method can get the comparable deceleration peak and time history. It is highly economical, and the experimental process is also repeatable, which can provide a reliable reference for the protection design into the projectile.

Micromechanical Force Sensor Using the Stress–Impedance Effect of Soft Magnetic FeCuNbSiB

By using the stress–impedance (SI) effect of a soft magnetic amorphous FeCuNbSiB alloy, a micromachined force sensor was fabricated and characterized. The alloy was used as a sputtered thin film of 500 nm thickness. To clarify the SI effect in the used material as a thin film, its magnetic and mechanical properties were first investigated. The stress dependence of the magnetic permeability was shown to be caused by the used transducer effect. The sputtered thin film also exhibited a large yield strength of 983 GPa. Even though the fabrication technology for the device is very simple, characterization revealed a gauge factor (GF) of 756, which is several times larger than that achieved with conventional transducer effects, such as the piezoresistive effect. The fabricated device shows great application potential as a tactile sensor.

Design and Fabrication Technology of Metal Mirrors Based on Additive Manufacturing: A Review

In recent years, much progress has been made on the development of metal mirrors based on additive manufacturing (AM). The sandwich mirror is well known for its excellent mechanical properties and challenging machining. Now, AM can be used to fabricate this complex structure and reduce the processing time and cost. In addition, with the aid of some new design methods for additive manufacturing, such as lattice, topology optimization (TO), and Voronoi, the freedom of mirror structure design is enormously improved. The common materials of mirrors include ceramics (SiC), glasses (glass ceramics, fused silica), and metals (aluminum, beryllium). Among them, the AM technology of metals is the most mature and widely used. Researchers have recently extensively developed the new-generation metal mirror to improve performance and lightweight rate. This review focuses on the following topics: (1) AM technologies and powder materials for metal mirrors, (2) recent advances in optomechanical design methods for AM metal mirrors, (3) challenges faced by AM metal mirrors in fabricating, and (4) future trends in AM metal mirrors.

Integration of Fluorescent, NV-Rich Nanodiamond Particles with AFM Cantilevers by Focused Ion Beam for Hybrid Optical and Micromechanical Devices

In this paper, a novel fabrication technology of atomic force microscopy (AFM) probes integrating cantilever tips with an NV-rich diamond particle is presented. Nanomanipulation techniques combined with the focused electron beam-induced deposition (FEBID) procedure were applied to position the NV-rich diamond particle on an AFM cantilever tip. Ultrasonic treatment of nanodiamond suspension was applied to reduce the size of diamond particles for proper geometry and symmetry. The fabricated AFM probes were tested utilizing measurements of the electrical resistance at highly oriented pyrolytic graphite (HOPG) and compared with a standard AFM cantilever performance. The results showed novel perspectives arising from combining the functionalities of a scanning AFM with optically detected magnetic resonance (ODMR). In particular, it offers enhanced magnetometric sensitivity and the nanometric resolution.