Heat and Mass Transfer Analysis for Coating Process of TiN Thin Film in a Tubular Reactor by Thermal CVD
2014 ◽
Vol 40
(5)
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pp. 425-431
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2011 ◽
Vol 38
(7)
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pp. 874-878
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2010 ◽
Vol 44
(3)
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pp. 236-248
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2006 ◽
Vol 50
(2)
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pp. 147-163
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2015 ◽
Vol 49
(4)
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pp. 351-360
2019 ◽
Vol 3
(3)
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pp. 035009
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