Heat and Mass Transfer Analysis for Coating Process of TiN Thin Film in a Tubular Reactor by Thermal CVD

2014 ◽  
Vol 40 (5) ◽  
pp. 425-431 ◽  
Author(s):  
Yuya Hatori ◽  
Hiroki Yamamoto ◽  
Ken-ichiro Tanoue ◽  
Tatsuo Nishimura
2019 ◽  
Vol 98 (10) ◽  
pp. 272-278
Author(s):  
Kazuhiro KURIHARA ◽  
Misaki HONDA ◽  
Ken-ichiro TANOUE

1982 ◽  
Vol 42 (4) ◽  
pp. 384-391
Author(s):  
Yu. A. Buevich ◽  
S. V. Kudymov

2019 ◽  
Vol 3 (3) ◽  
pp. 035009 ◽  
Author(s):  
Noor Saeed Khan ◽  
Samina Zuhra ◽  
Zahir Shah ◽  
Ebenezer Bonyah ◽  
Waris Khan ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document