Straightness Measurement Method by Using an Optical Heterodyne Interferometer with a Gratiing.
2001 ◽
Vol 67
(663)
◽
pp. 3505-3512
◽
1991 ◽
Vol 13
(3)
◽
pp. 115-124
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2008 ◽
Vol 25
(11)
◽
pp. 2630
◽
1996 ◽
Vol 35
(Part 1, No. 5B)
◽
pp. 3222-3225
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2000 ◽
Vol 184
(1-4)
◽
pp. 49-55
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1980 ◽
Vol 27
(8)
◽
pp. 1253-1262
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1998 ◽
Vol 34
(9)
◽
pp. 1133-1138