scholarly journals Straightness Measurement Method by Using an Optical Heterodyne Interferometer with a Gratiing.

2001 ◽  
Vol 67 (663) ◽  
pp. 3505-3512 ◽  
Author(s):  
Hisashi TANIMURA ◽  
Shin ASANO ◽  
Takayuki GOTO ◽  
Kimiyuki MITSUI
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